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Reel/Frame:039325/0892   Pages: 8
Recorded: 08/03/2016
Attorney Dkt #:24548-0058002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/26/2019
Application #:
15226952
Filing Dt:
08/03/2016
Publication #:
Pub Dt:
11/24/2016
Title:
METHOD OF OPERATING A PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY
Assignors
1
Exec Dt:
08/05/2013
2
Exec Dt:
08/09/2013
3
Exec Dt:
08/06/2013
4
Exec Dt:
09/26/2013
5
Exec Dt:
07/24/2013
6
Exec Dt:
07/23/2013
Assignee
1
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondence name and address
CHRIS C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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