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Total properties:
57
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|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/1983
|
Application #:
|
06280414
|
Filing Dt:
|
07/06/1981
|
|
Title:
|
PARTICLE BEAM INSTRUMENTATION ION PUMP
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/24/1984
|
Application #:
|
06280416
|
Filing Dt:
|
07/06/1981
|
|
Title:
|
HIGH THROUGHPUT/HIGH RESOLUTION PARTICLE BEAM SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/17/1985
|
Application #:
|
06332832
|
Filing Dt:
|
12/21/1981
|
|
Title:
|
LASER PATTERN GENERATING SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/25/1983
|
Application #:
|
06337205
|
Filing Dt:
|
01/05/1982
|
|
Title:
|
ELECTROSTATIC CASSETTE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/1984
|
Application #:
|
06342696
|
Filing Dt:
|
01/26/1982
|
|
Title:
|
COMPOSITE CONCENTRIC-GAP MAGNETIC LENS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/05/1985
|
Application #:
|
06491678
|
Filing Dt:
|
05/05/1983
|
|
Title:
|
VIRTUAL ADDRESSING FOR E-BEAM LITHOGRAPHY
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/28/1986
|
Application #:
|
06545650
|
Filing Dt:
|
10/26/1983
|
|
Title:
|
DATA HANDLING SYSTEM FOR A PATTERN GENERATOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/22/1987
|
Application #:
|
06600246
|
Filing Dt:
|
04/16/1984
|
|
Title:
|
FIELD EMISSION GUN ELECTRODE GEOMETRY FOR IMPROVED FOCUS STABILITY
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/29/1988
|
Application #:
|
07036731
|
Filing Dt:
|
04/10/1987
|
|
Title:
|
SPECIMEN DISTANCE MEASURING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/20/1988
|
Application #:
|
07062038
|
Filing Dt:
|
06/15/1987
|
|
Title:
|
DIFFERENTIALLY PUMPED SEAL APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/19/1992
|
Application #:
|
07075175
|
Filing Dt:
|
07/20/1987
|
|
Title:
|
LASER PATTERN GENERATING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/06/1989
|
Application #:
|
07109883
|
Filing Dt:
|
10/15/1987
|
|
Title:
|
GUARD RING FOR A DIFFERENTIALLY PUMPED SEAL APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/04/1989
|
Application #:
|
07141812
|
Filing Dt:
|
01/11/1988
|
|
Title:
|
APPARATUS FOR PRESELECTING AND MAINTAINING A FIXED GAP BETWEEN A WORKPIECE AND A VACUUM SEAL APPARATUS IN PARTICLE BEAM LITHOGRAPHY SYSTEMS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/05/1989
|
Application #:
|
07167601
|
Filing Dt:
|
03/14/1988
|
|
Title:
|
SILCON GRID AS A REFERENCE AND CALIBRATION STANDARD IN A PARTICLE BEAM LITHOGRAPHY SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/30/1990
|
Application #:
|
07367919
|
Filing Dt:
|
06/19/1989
|
|
Title:
|
METHOD OF CREATING ISOLATED PLATES ON THE INSIDE SURFACE OF A METALLIZED SUBSTRATE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/29/1990
|
Application #:
|
07385042
|
Filing Dt:
|
07/26/1989
|
|
Title:
|
PASSIVE ELECTROSTATIC VACUUM PARTICLE COLLECTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/22/1991
|
Application #:
|
07391202
|
Filing Dt:
|
08/08/1989
|
|
Title:
|
ELECTRON-DETECTOR DIODE BIASSING SCHEME FOR IMPROVED WRITING BY AN ELECTRON BEAM LITHOGRAPHY MACHINE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/11/1990
|
Application #:
|
07391715
|
Filing Dt:
|
08/07/1989
|
|
Title:
|
NON-CONTACTING METHOD OF CLEANING SURFACES WITH A PLANOAR GAS BEARING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/30/1991
|
Application #:
|
07524508
|
Filing Dt:
|
05/17/1990
|
|
Title:
|
THERMALLY STABLE MAGNETIC DEFLECTION ASSEMBLY AND METHOD OF MAKING SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/04/1992
|
Application #:
|
07648667
|
Filing Dt:
|
01/31/1991
|
|
Title:
|
TEMPERATURE STABLE MAGNETIC DEFLECTION ASSEMBLY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/07/1992
|
Application #:
|
07664066
|
Filing Dt:
|
03/04/1991
|
|
Title:
|
MULTIPHASE PRINTING FOR E-BEAM LITHOGRAPHY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/23/1993
|
Application #:
|
07671425
|
Filing Dt:
|
03/04/1991
|
|
Title:
|
LOW ABERRATION FIELD EMISSION ELECTRON GUN
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/11/1993
|
Application #:
|
07705227
|
Filing Dt:
|
05/24/1991
|
|
Title:
|
LAMINAR FLOW GAS DIFFUSER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/04/1994
|
Application #:
|
07706612
|
Filing Dt:
|
05/29/1991
|
|
Title:
|
HIGH ACCURACY BEAM BLANKER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/19/1993
|
Application #:
|
07713929
|
Filing Dt:
|
06/12/1991
|
|
Title:
|
ROLLING ELEMENT CAGE CONSTRAINT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/13/1993
|
Application #:
|
07720205
|
Filing Dt:
|
06/24/1991
|
|
Title:
|
SMALL FIELD SCANNER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/21/1993
|
Application #:
|
07759553
|
Filing Dt:
|
09/12/1991
|
|
Title:
|
DISCRETE PHASE SHIFT MASK WRITING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/05/1993
|
Application #:
|
07816981
|
Filing Dt:
|
01/03/1992
|
|
Title:
|
ARC SUPPRESSOR FOR ELECTRON GUN
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/19/1994
|
Application #:
|
07828538
|
Filing Dt:
|
01/24/1992
|
|
Title:
|
MECHANICALLY STABLE FIELD EMISSION GUN
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/1995
|
Application #:
|
07970480
|
Filing Dt:
|
11/02/1992
|
|
Title:
|
LASER PATTERN GENERATION APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/19/1993
|
Application #:
|
08000676
|
Filing Dt:
|
01/05/1993
|
|
Title:
|
SMALL FIELD SCANNER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/02/1995
|
Application #:
|
08023983
|
Filing Dt:
|
02/26/1993
|
|
Title:
|
DIFFERENTIAL VIRTUAL GROUND BEAM BLANKER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/06/1994
|
Application #:
|
08037964
|
Filing Dt:
|
03/26/1993
|
|
Title:
|
METHOD AND STRUCTURE FOR ELECTRONICALLY MEASURING BEAM PARAMETERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/28/1995
|
Application #:
|
08069222
|
Filing Dt:
|
05/28/1993
|
|
Title:
|
DOSE MODULATION AND PIXEL DEFLECTION FOR RASTER SCAN LITHOGRAPHY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/02/1996
|
Application #:
|
08344417
|
Filing Dt:
|
11/22/1994
|
|
Title:
|
RASTERIZER FOR A PATTERN GENERATION APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/14/1998
|
Application #:
|
08409251
|
Filing Dt:
|
03/22/1995
|
|
Title:
|
MAGNIFICATION CORRECTION FOR SMALL FIELD SCANNING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/29/1998
|
Application #:
|
08410601
|
Filing Dt:
|
03/22/1995
|
|
Title:
|
SCANNING LITHOGRAPHY SYSTEM WITH OPPOSING MOTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/26/1998
|
Application #:
|
08412232
|
Filing Dt:
|
03/22/1995
|
|
Title:
|
SCANNING LITHOGRAPHY SYSTEM HAVING DOUBLE PASS WYNNE-DYSON OPTICS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/14/1998
|
Application #:
|
08691754
|
Filing Dt:
|
08/02/1996
|
|
Title:
|
MAGNIFICATION CORRECTION FOR SMALL FIELD SCANNING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/17/1998
|
Application #:
|
08721287
|
Filing Dt:
|
09/26/1996
|
|
Title:
|
COMPOSITE CONCENTRIC-GAP MAGNETIC LENS AND DEFLECTOR WITH CONICAL POLE PIECES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/04/1999
|
Application #:
|
08726449
|
Filing Dt:
|
10/04/1996
|
|
Title:
|
OPERATING A SOLID STATE PARTICLE DETECTOR WITHIN A MAGNETIC DEFLECTION FIELD SO AS TO MINIMIZE EDDY CURRENTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/17/1998
|
Application #:
|
08733673
|
Filing Dt:
|
10/17/1996
|
|
Title:
|
CONICAL BAFFLE FOR REDUCING CHARGING DRIFT IN A PARTICLE BEAM SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/28/1998
|
Application #:
|
08766271
|
Filing Dt:
|
12/13/1996
|
|
Title:
|
VACUUM COMPATIBLE LINEAR MOTION DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/14/2000
|
Application #:
|
08769169
|
Filing Dt:
|
12/18/1996
|
|
Title:
|
SHORT WAVELENGTH PULSED LASER SCANNER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/10/1998
|
Application #:
|
08779180
|
Filing Dt:
|
01/06/1997
|
|
Title:
|
ARTICULATED PLATFORM MECHANISM FOR LASER PATTERN GENERATION ON A WORKPIECE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/08/1998
|
Application #:
|
08789246
|
Filing Dt:
|
01/28/1997
|
|
Title:
|
METHOD AND APPARATUS FOR RUN-TIME CORRECTION OF PROXIMITY EFFECTS IN PATTERN GENERATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/02/1999
|
Application #:
|
08789247
|
Filing Dt:
|
01/28/1997
|
|
Title:
|
RASTER SHAPE BEAM WRITING STRATEGY SYSTEM AND METHOD FOR PATTERN GENERATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/14/1999
|
Application #:
|
09007018
|
Filing Dt:
|
01/14/1998
|
|
Title:
|
COMPOSITE CONCENTRIC- GAP MAGNETIC LENS AND DEFLECTOR WITH CONICAL POLWE PIECES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/08/2000
|
Application #:
|
09034893
|
Filing Dt:
|
03/03/1998
|
|
Title:
|
T-SHAPED ELECTRON-BEAM MICROCOLUMN AS A GENERAL PURPOSE SCANNING ELECTRON MICROSCOPE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/14/2000
|
Application #:
|
09045490
|
Filing Dt:
|
03/20/1998
|
|
Title:
|
METHOD AND APPARATUS FOR DIRECT WRITING OF SEMICONDUCTOR DIE USING MICROCOLUMN ARRAY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/04/2000
|
Application #:
|
09058258
|
Filing Dt:
|
04/10/1998
|
|
Title:
|
SHAPED SHADOW PROJECTION FOR AN ELECTRON BEAM COLUMN
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/28/1999
|
Application #:
|
09060496
|
Filing Dt:
|
04/14/1998
|
|
Title:
|
DETECTING REGISTRATION MARKS WITH A LOW ENERGY ELECTRON BEAM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/05/2000
|
Application #:
|
09074558
|
Filing Dt:
|
05/07/1998
|
|
Title:
|
CHARGED PARTICLE BEAM ILLUMINATION OF BLANKING APERTURE ARRAY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/22/2000
|
Application #:
|
09092319
|
Filing Dt:
|
06/05/1998
|
|
Title:
|
CHEVRON CORRECTION AND AUTOFOCUS OPTICS FOR LASER SCANNER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/02/2000
|
Application #:
|
09106917
|
Filing Dt:
|
06/29/1998
|
|
Title:
|
TWO PIECE MIRROR ARRANGEMENT FOR INTERFEROMETRICALLY CONTROLLED STAGE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/20/2000
|
Application #:
|
09195843
|
Filing Dt:
|
11/19/1998
|
|
Title:
|
SILICON MICROLENS CLEANING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/22/2000
|
Application #:
|
09372471
|
Filing Dt:
|
08/11/1999
|
|
Title:
|
PHOTORESIST DEVELOPER AND METHOD
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|
