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Reel/Frame:	039805/0895			Pages:	7
		Recorded:	09/20/2016
Attorney Dkt #:	087720-0648174 (GEN)
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 26

Patent #:	7923790	Issue Dt:	04/12/2011	Application #:	11716070	Filing Dt:	03/09/2007
Title:	PLANAR MICROSHELLS FOR VACUUM ENCAPSULATED DEVICES AND DAMASCENE METHOD OF MANUFACTURE

Patent #:	7816166	Issue Dt:	10/19/2010	Application #:	11716082	Filing Dt:	03/09/2007
Title:	METHOD TO FORM A MEMS STRUCTURE HAVING A SUSPENDED PORTION

Patent #:	7639104	Issue Dt:	12/29/2009	Application #:	11716115	Filing Dt:	03/09/2007
Title:	METHOD FOR TEMPERATURE COMPENSATION IN MEMS RESONATORS WITH ISOLATED REGIONS OF DISTINCT MATERIAL

Patent #:	7659150	Issue Dt:	02/09/2010	Application #:	11716156	Filing Dt:	03/09/2007
Title:	MICROSHELLS FOR MULTI-LEVEL VACUUM CAVITIES

Patent #:	7858422	Issue Dt:	12/28/2010	Application #:	11716227	Filing Dt:	03/09/2007
Title:	MEMS COUPLER AND METHOD TO FORM THE SAME

Patent #:	7514760	Issue Dt:	04/07/2009	Application #:	11716284	Filing Dt:	03/09/2007
Title:	IC-COMPATIBLE MEMS STRUCTURE

Patent #:	8349635	Issue Dt:	01/08/2013	Application #:	12124043	Filing Dt:	05/20/2008
Title:	ENCAPSULATED MEMS DEVICE AND METHOD TO FORM THE SAME

Patent #:	7999635	Issue Dt:	08/16/2011	Application #:	12182082	Filing Dt:	07/29/2008
Title:	OUT-OF-PLANE MEMS RESONATOR WITH STATIC OUT-OF-PLANE DEFLECTION

Patent #:	7944124	Issue Dt:	05/17/2011	Application #:	12201819	Filing Dt:	08/29/2008
Title:	MEMS STRUCTURE HAVING A STRESS-INDUCER TEMPERATURE-COMPENSATED RESONATOR MEMBER

Patent #:	8464418	Issue Dt:	06/18/2013	Application #:	12638919	Filing Dt:	12/15/2009
Publication #:	US20100093125	Pub Dt:	04/15/2010
Title:	METHOD FOR TEMPERATURE COMPENSATION IN MEMS RESONATORS WITH ISOLATED REGIONS OF DISTINCT MATERIAL

Patent #:	8716815	Issue Dt:	05/06/2014	Application #:	12927312	Filing Dt:	11/10/2010
Publication #:	US20110068422	Pub Dt:	03/24/2011
Title:	Mems coupler and method to form the same

Patent #:	8669831	Issue Dt:	03/11/2014	Application #:	12950519	Filing Dt:	11/19/2010
Publication #:	US20110084781	Pub Dt:	04/14/2011
Title:	METHOD FOR TEMPERATURE COMPENSATION IN MEMS RESONATORS WITH ISOLATED REGIONS OF DISTINCT MATERIAL

Patent #:	8273594	Issue Dt:	09/25/2012	Application #:	13017767	Filing Dt:	01/31/2011
Publication #:	US20110121415	Pub Dt:	05/26/2011
Title:	PLANAR MICROSHELLS FOR VACUUM ENCAPSULATED DEVICES AND DAMASCENE METHOD OF MANUFACTURE

Patent #:	8288835	Issue Dt:	10/16/2012	Application #:	13017844	Filing Dt:	01/31/2011
Publication #:	US20110121412	Pub Dt:	05/26/2011
Title:	MICROSHELLS WITH INTEGRATED GETTER LAYER

Patent #:	8313970	Issue Dt:	11/20/2012	Application #:	13017892	Filing Dt:	01/31/2011
Publication #:	US20110121416	Pub Dt:	05/26/2011
Title:	PLANAR MICROSHELLS FOR VACUUM ENCAPSULATED DEVICES AND DAMASCENE METHOD OF MANUFACTURE

Patent #:	8852984	Issue Dt:	10/07/2014	Application #:	13075800	Filing Dt:	03/30/2011
Title:	TECHNIQUE FOR FORMING A MEMS DEVICE

Patent #:	8877536	Issue Dt:	11/04/2014	Application #:	13075806	Filing Dt:	03/30/2011
Title:	TECHNIQUE FOR FORMING A MEMS DEVICE USING ISLAND STRUCTURES

Patent #:	8258893	Issue Dt:	09/04/2012	Application #:	13173432	Filing Dt:	06/30/2011
Publication #:	US20110260810	Pub Dt:	10/27/2011
Title:	OUT-OF-PLANE MEMS RESONATOR WITH STATIC OUT-OF-PLANE DEFLECTION

Patent #:	8471641	Issue Dt:	06/25/2013	Application #:	13173815	Filing Dt:	06/30/2011
Publication #:	US20130002364	Pub Dt:	01/03/2013
Title:	SWITCHABLE ELECTRODE FOR POWER HANDLING

Patent #:	8629739	Issue Dt:	01/14/2014	Application #:	13599240	Filing Dt:	08/30/2012
Publication #:	US20120329255	Pub Dt:	12/27/2012
Title:	OUT-OF-PLANE MEMS RESONATOR WITH STATIC OUT-OF-PLANE DEFLECTION

Patent #:	9422157	Issue Dt:	08/23/2016	Application #:	13901258	Filing Dt:	05/23/2013
Publication #:	US20150266724	Pub Dt:	09/24/2015
Title:	METHOD FOR TEMPERATURE COMPENSATION IN MEMS RESONATORS WITH ISOLATED REGIONS OF DISTINCT MATERIAL

Patent #:	9260290	Issue Dt:	02/16/2016	Application #:	14494688	Filing Dt:	09/24/2014
Publication #:	US20150008545	Pub Dt:	01/08/2015
Title:	TECHNIQUE FOR FORMING A MEMS DEVICE

Patent #:	9428377	Issue Dt:	08/30/2016	Application #:	14532658	Filing Dt:	11/04/2014
Publication #:	US20160023888	Pub Dt:	01/28/2016
Title:	Methods And Structures For Thin-Film Encapsulation And Co-Integration Of Same With Microelectronic Devices and Microelectromechanical Systems (MEMS)

Patent #:	9637371	Issue Dt:	05/02/2017	Application #:	14532675	Filing Dt:	11/04/2014
Publication #:	US20160023889	Pub Dt:	01/28/2016
Title:	Membrane Transducer Structures And Methods Of Manufacturing Same Using Thin-Film Encapsulation

Patent #:	9422149	Issue Dt:	08/23/2016	Application #:	14532723	Filing Dt:	11/04/2014
Publication #:	US20160025664	Pub Dt:	01/28/2016
Title:	TRAPPED SACRIFICIAL STRUCTURES AND METHODS OF MANUFACTURING SAME USING THIN-FILM ENCAPSULATION

Assignor

Exec Dt:

04/12/2016

Assignee

18 ZHANGJIANG ROAD

PUDONG NEW AREA

SHANGHAI, CHINA 201203

Correspondence name and address
	KILPATRICK TOWNSEND AND STOCKTON LLP
	TWO EMBARCADERO CENTER
	EIGHTH FLOOR
	SAN FRANCISCO, CA 94111-3834

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