Patent Assignment Details
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Reel/Frame: | 013163/0896 | |
| Pages: | 3 |
| | Recorded: | 08/01/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/19/2008
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Application #:
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10209617
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Filing Dt:
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08/01/2002
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Publication #:
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Pub Dt:
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02/06/2003
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Assignee
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3-6, AKASAKA 5-CHOME |
MINATO-KU, TOKYO-TO, JAPAN |
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Correspondence name and address
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SMITH, GAMBRELL & RUSSELL
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MICHAEL A. MAKUCH
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1850 M STREET, N.W., SUITE 800
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WASHINGTON, D.C. 20036
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