Patent Assignment Details
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Reel/Frame: | 013969/0896 | |
| Pages: | 8 |
| | Recorded: | 04/18/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/20/2003
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Application #:
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09805860
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Filing Dt:
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03/13/2001
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Publication #:
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Pub Dt:
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07/26/2001
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Title:
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LASER INTERFEROMETRY ENDPOINT DETECTION WITH WINDOWLESS POLISHING PAD FOR CHEMICAL MECHANICAL POLISHING PROCESS
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Assignee
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GROENEWOUDSEWEG 1 |
EINDHOVEN, NETHERLANDS 5621 BA |
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Correspondence name and address
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PHILIPS ELECTRONICS NORTH AMERICA CORP.
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MICHAEL E. SCHMITT
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1000 WET MAUDE AVENUE
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INTELLECTUAL PROPERTY & STANDARDS
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SUNNYVALE, CA 94085
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