Patent Assignment Details
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Reel/Frame: | 023331/0896 | |
| Pages: | 2 |
| | Recorded: | 10/06/2009 | | |
Attorney Dkt #: | TEA-048 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12574101
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Filing Dt:
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10/06/2009
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Publication #:
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Pub Dt:
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04/07/2011
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Title:
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Method of providing stable and adhesive interface between fluorine-based low-k material and metal barrier layer
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Assignee
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AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME |
MINATO-KU, TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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4350 WEST CHANDLER BLVD.
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SUITE 10/11
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CHANDLER, AZ 85226
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