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Reel/Frame:	027231/0896			Pages:	12
		Recorded:	11/15/2011
Attorney Dkt #:	3576-001
Conveyance:	CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).

Total properties: 25

Patent #:	6183563	Issue Dt:	02/06/2001	Application #:	09313765	Filing Dt:	05/18/1999
Title:	APPARATUS FOR DEPOSITING THIN FILMS ON SEMICONDUCTOR WAFER

Patent #:	6740166	Issue Dt:	05/25/2004	Application #:	09726977	Filing Dt:	11/30/2000
Publication #:	US20020134307	Pub Dt:	09/26/2002
Title:	THIN FILM DEPOSITION APPARATUS FOR SEMICONDUCTOR

Patent #:	6435428	Issue Dt:	08/20/2002	Application #:	09776004	Filing Dt:	02/02/2001
Publication #:	US20010042799	Pub Dt:	11/22/2001
Title:	SHOWERHEAD APPARATUS FOR RADICAL-ASSISTED DEPOSITION

Patent #:	6796316	Issue Dt:	09/28/2004	Application #:	09848533	Filing Dt:	05/03/2001
Publication #:	US20020007790	Pub Dt:	01/24/2002
Title:	ATOMIC LAYER DEPOSITION (ALD) THIN FILM DEPOSITION EQUIPMENT HAVING CLEANING APPARATUS AND CLEANING METHOD

Patent #:	6852168	Issue Dt:	02/08/2005	Application #:	09848577	Filing Dt:	05/03/2001
Publication #:	US20020000196	Pub Dt:	01/03/2002
Title:	REACTOR FOR DEPOSITING THIN FILM ON WAFER

Patent #:	6579372	Issue Dt:	06/17/2003	Application #:	09848579	Filing Dt:	05/03/2001
Publication #:	US20020052097	Pub Dt:	05/02/2002
Title:	APPARATUS AND METHOD FOR DEPOSITING THIN FILM ON WAFER USING ATOMIC LAYER DEPOSITION

Patent #:	6573184	Issue Dt:	06/03/2003	Application #:	10094571	Filing Dt:	03/07/2002
Publication #:	US20020094689	Pub Dt:	07/18/2002
Title:	APPARATUS AND METHOD FOR DEPOSITING THIN FILM ON WAFER USING ATOMIC LAYER DEPOSITION

Patent #:	6886491	Issue Dt:	05/03/2005	Application #:	10102108	Filing Dt:	03/19/2002
Publication #:	US20020129769	Pub Dt:	09/19/2002
Title:	Plasma chemical vapor deposition apparatus

Patent #:	7163719	Issue Dt:	01/16/2007	Application #:	10712876	Filing Dt:	11/12/2003
Publication #:	US20040105935	Pub Dt:	06/03/2004
Title:	METHOD OF DEPOSITING THIN FILM USING HAFNIUM COMPOUND

Patent #:	6884297	Issue Dt:	04/26/2005	Application #:	10804912	Filing Dt:	03/19/2004
Publication #:	US20040187780	Pub Dt:	09/30/2004
Title:	THIN FILM DEPOSITION REACTOR

Patent #:	7410676	Issue Dt:	08/12/2008	Application #:	11080237	Filing Dt:	03/14/2005
Publication #:	US20050217582	Pub Dt:	10/06/2005
Title:	CHEMICAL VAPOR DEPOSITION METHOD

Patent #:	7253101	Issue Dt:	08/07/2007	Application #:	11205990	Filing Dt:	08/17/2005
Publication #:	US20060040495	Pub Dt:	02/23/2006
Title:	A DEPOSITION METHOD OF TIN THIN FILM HAVING A MULTI-LAYER STRUCTURE

Patent #:	7638437	Issue Dt:	12/29/2009	Application #:	11260559	Filing Dt:	10/27/2005
Publication #:	US20060148268	Pub Dt:	07/06/2006
Title:	IN-SITU THIN-FILM DEPOSITION METHOD

Patent #:	8029859	Issue Dt:	10/04/2011	Application #:	11507829	Filing Dt:	08/22/2006
Publication #:	US20070048977	Pub Dt:	03/01/2007
Title:	METHOD OF DEPOSITING GE-SB-TE THIN FILM

Patent #:	7785664	Issue Dt:	08/31/2010	Application #:	11571547	Filing Dt:	01/02/2007
Publication #:	US20080044567	Pub Dt:	02/21/2008
Title:	METHOD OF DEPOSITING THIN FILM

Patent #:	7842606	Issue Dt:	11/30/2010	Application #:	11720450	Filing Dt:	05/30/2007
Publication #:	US20080166887	Pub Dt:	07/10/2008
Title:	METHOD OF DEPOSITING THIN FILM AND METHOD OF MANUFACTURING SEMICONDUCTOR USING THE SAME

Patent #:	8741096	Issue Dt:	06/03/2014	Application #:	11770117	Filing Dt:	06/28/2007
Publication #:	US20080000422	Pub Dt:	01/03/2008
Title:	APPARATUS FOR SEMICONDUCTOR PROCESSING

Patent #:	7803656	Issue Dt:	09/28/2010	Application #:	12301071	Filing Dt:	11/17/2008
Publication #:	US20090093083	Pub Dt:	04/09/2009
Title:	METHOD OF DEPOSITING CHALCOGENIDE FILM FOR PHASE-CHANGE MEMORY

Patent #:	NONE	Issue Dt:		Application #:	12669498	Filing Dt:	01/18/2010
Publication #:	US20100190341	Pub Dt:	07/29/2010
Title:	APPARATUS, METHOD FOR DEPOSITING THIN FILM ON WAFER AND METHOD FOR GAP-FILLING TRENCH USING THE SAME

Patent #:	NONE	Issue Dt:		Application #:	12842840	Filing Dt:	07/23/2010
Publication #:	US20110021035	Pub Dt:	01/27/2011
Title:	DEPOSITION APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME

Patent #:	8367549	Issue Dt:	02/05/2013	Application #:	12845481	Filing Dt:	07/28/2010
Publication #:	US20110034036	Pub Dt:	02/10/2011
Title:	METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Patent #:	NONE	Issue Dt:		Application #:	12902850	Filing Dt:	10/12/2010
Publication #:	US20110083735	Pub Dt:	04/14/2011
Title:	SOLAR CELL AND METHOD OF FABRICATING THE SAME

Patent #:	8772077	Issue Dt:	07/08/2014	Application #:	12936563	Filing Dt:	10/06/2010
Publication #:	US20110027976	Pub Dt:	02/03/2011
Title:	METHOD OF FORMING CHALCOGENIDE THIN FILM

Patent #:	NONE	Issue Dt:		Application #:	13054072	Filing Dt:	01/13/2011
Publication #:	US20110114114	Pub Dt:	05/19/2011
Title:	CLEANING METHOD OF APPARATUS FOR DEPOSITING CARBON CONTAINING FILM

Patent #:	8980742	Issue Dt:	03/17/2015	Application #:	13060404	Filing Dt:	02/23/2011
Publication #:	US20110151664	Pub Dt:	06/23/2011
Title:	METHOD OF MANUFACTURING MULTI-LEVEL METAL THIN FILM AND APPARATUS FOR MANUFACTURING THE SAME

Assignor

Exec Dt:

03/24/2011

Assignee

332-1, CHEONGHO-RI, JINWI-MYEON,

PYEONGTAEK-CITY, GYEONGGI-DO, KOREA, REPUBLIC OF

Correspondence name and address
	HOSOON LEE
	9600 SW OAK ST. SUITE 525
	PORTLAND, OR 97223

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