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Patent Assignment Details
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Reel/Frame:014551/0914   Pages: 3
Recorded: 09/18/2003
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
10665165
Filing Dt:
09/18/2003
Publication #:
Pub Dt:
04/01/2004
Title:
Feedback control of a chemical mechanical polishing process for multi-layered films
Assignor
1
Exec Dt:
09/18/2003
Assignee
1
3050 BOWERS AVENUE
P.O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondence name and address
APPLIES MATERIALS, INC.
MARY ROSE SCOZZAFAVA
3050 BOWERS AVENUE, P.O. BOX 450A
LEGAL AFFAIRS DEPARTMENT, PATENT COUNSEL
SANTA CLARA, CA 95008

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