Patent Assignment Details
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| Reel/Frame: | 025863/0914 | |
| Pages: | 3 |
| | Recorded: | 02/25/2011 | | |
| Attorney Dkt #: | 1857.8840001 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/02/2014
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Application #:
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13000229
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Filing Dt:
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04/18/2011
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Publication #:
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Pub Dt:
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08/04/2011
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Title:
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OVERLAY MEASUREMENT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD USING SUCH OVERLAY MEASUREMENT APPARATUS
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Assignee
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL - 5504 DR |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
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1100 NEW YORK AVENUE, N.W.
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WASHINGTON, DC 20005
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