Patent Assignment Details
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Reel/Frame: | 055269/0916 | |
| Pages: | 6 |
| | Recorded: | 02/16/2021 | | |
Attorney Dkt #: | 190882US02 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/08/2022
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Application #:
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17176342
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Filing Dt:
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02/16/2021
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Publication #:
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Pub Dt:
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11/04/2021
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Title:
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Systems and Methods to Control Critical Dimension (CD) Shrink Ratio through Radio Frequency (RF) Pulsing
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Assignee
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AKASAKA BIZ TOWER |
3-1 AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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2400 GROVE BLVD.
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AUSTIN, TX 78741
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