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Reel/Frame:018707/0922   Pages: 3
Recorded: 01/04/2007
Attorney Dkt #:681939.0166/166US
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
04/19/2011
Application #:
11636927
Filing Dt:
12/11/2006
Publication #:
Pub Dt:
06/12/2008
Title:
METHOD OF IMPROVING OVERLAY PERFORMANCE IN SEMICONDUCTOR MANUFACTURE
Assignors
1
Exec Dt:
11/23/2006
2
Exec Dt:
11/26/2006
Assignee
1
NO. 16, LI-HSIN ROAD
SCIENCE-BASED INDUSTRIAL PARK
HSINCHU, R.O.C., TAIWAN
Correspondence name and address
CLARK A. JABLON (681939-166US)
ONE COMMERCE SQUARE
2005 MARKET STREET, SUITE 2200
PHILADELPHIA, PA 19103

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