Patent Assignment Details
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Reel/Frame: | 018599/0928 | |
| Pages: | 4 |
| | Recorded: | 11/21/2006 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/31/2012
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Application #:
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11580246
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Filing Dt:
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10/13/2006
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Publication #:
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Pub Dt:
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04/17/2008
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Title:
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INSPECTION METHOD AND APPARATUS, LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROCESSING CELL AND DEVICE MANUFACTURING METHOD
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Assignee
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DE RUN 6501, NL-5504 DR |
VELDHOVEN, NETHERLANDS |
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Correspondence name and address
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PILLSBURY WINTHROP SHAW, ET AL.
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P.O.B OX 10500
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1650 TYSONS BOULEVARD
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MCLEAN, VA 22102
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