Total properties:
110
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2
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2
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Patent #:
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Issue Dt:
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08/31/2010
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Application #:
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12389673
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Filing Dt:
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02/20/2009
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Publication #:
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Pub Dt:
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07/02/2009
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Title:
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ENHANCED MULTI CHANNEL ALIGNMENT
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Patent #:
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Issue Dt:
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10/19/2010
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Application #:
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12392663
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Filing Dt:
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02/25/2009
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Publication #:
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Pub Dt:
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08/27/2009
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Title:
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REAL TIME IMPRINT PROCESS DIAGNOSTICS FOR DEFECTS
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Patent #:
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Issue Dt:
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04/19/2011
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Application #:
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12430428
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Filing Dt:
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04/27/2009
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Publication #:
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Pub Dt:
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08/13/2009
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Title:
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FULL-WAFER OR LARGE AREA IMPRINTING WITH MULTIPLE SEPARATED SUB-FIELDS FOR HIGH THROUGHPUT LITHOGRAPHY
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Patent #:
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Issue Dt:
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02/01/2011
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Application #:
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12576030
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Filing Dt:
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10/08/2009
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Publication #:
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Pub Dt:
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02/18/2010
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Title:
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INTERFEROMETRIC ANALYSIS METHOD FOR THE MANUFACTURE OF NANO-SCALE DEVICES
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Patent #:
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Issue Dt:
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01/25/2011
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Application #:
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12605848
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Filing Dt:
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10/26/2009
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Publication #:
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Pub Dt:
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02/18/2010
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Title:
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TEMPLATE HAVING A SILICON NITRIDE, SILICON CARBIDE OR SILICON OXYNITRIDE FILM
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Patent #:
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Issue Dt:
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04/26/2011
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Application #:
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12688190
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Filing Dt:
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01/15/2010
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Publication #:
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Pub Dt:
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05/13/2010
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Title:
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METHOD TO CONTROL AN ATMOSPHERE BETWEEN A BODY AND A SUBSTRATE
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Patent #:
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Issue Dt:
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12/28/2010
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Application #:
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12689773
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Filing Dt:
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01/19/2010
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Publication #:
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Pub Dt:
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06/10/2010
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Title:
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POSITIVE TONE BI-LAYER METHOD
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Patent #:
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Issue Dt:
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03/22/2011
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Application #:
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12707365
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Filing Dt:
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02/17/2010
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Publication #:
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Pub Dt:
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06/10/2010
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Title:
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CAPILLARY IMPRINTING TECHNIQUE
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Patent #:
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Issue Dt:
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05/17/2011
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Application #:
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12762658
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Filing Dt:
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04/19/2010
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Publication #:
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Pub Dt:
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08/12/2010
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Title:
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STEP AND REPEAT IMPRINT LITHOGRAPHY PROCESSES
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Patent #:
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Issue Dt:
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05/24/2011
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Application #:
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12946063
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Filing Dt:
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11/15/2010
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Publication #:
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Pub Dt:
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03/10/2011
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Title:
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POSITIVE TONE BI-LAYER METHOD
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