Patent Assignment Details
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| Reel/Frame: | 009421/0932 | |
| Pages: | 3 |
| | Recorded: | 08/17/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09025965
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Filing Dt:
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02/19/1998
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Title:
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METHOD AND APPARATUS FOR IMPROVING GAP-FILL CAPABILITY USING CHEMICAL AND PHYSICAL ETCHBACKS
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Assignee
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| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A, M/S #2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT W. MULCAHY
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LEGAL AFFAIRS DEPT.
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P.O. BOX 450A, M/S 2061
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SANTA CLARA, CA 95052
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