Patent Assignment Details
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Reel/Frame: | 016601/0938 | |
| Pages: | 2 |
| | Recorded: | 05/27/2005 | | |
Attorney Dkt #: | ASMJP.163AUS |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11040863
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Filing Dt:
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01/21/2005
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Publication #:
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Pub Dt:
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07/27/2006
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Title:
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Semiconductor-manufacturing apparatus provided with ultraviolet light-emitting mechanism and method of treating semiconductor substrate using ultraviolet light emission
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Assignee
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23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, |
TOKYO 206-0025, JAPAN |
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Correspondence name and address
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KNOBBE MARTENS OLSON & BEAR LLP
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2040 MAIN STREET
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FOURTEENTH FLOOR
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IRVINE, CA 92614
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