Patent Assignment Details
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Reel/Frame: | 017861/0938 | |
| Pages: | 3 |
| | Recorded: | 05/04/2006 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/11/2009
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Application #:
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11417163
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Filing Dt:
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05/04/2006
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Publication #:
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Pub Dt:
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11/09/2006
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Title:
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EDGE EXPOSURE APPARATUS, COATING AND DEVELOPING APPARATUS, AND EDGE EXPOSURE METHOD
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Assignee
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3-6, AKASAKA 5-CHOME |
MINATO-KU, TOKYO 107-8481, JAPAN |
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Correspondence name and address
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SMITH GAMBRELL & RUSSELL
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185 M STREET, N.W.
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SUITE 800
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WASHINGTON, DC 20036
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