Patent Assignment Details
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Reel/Frame: | 014635/0941 | |
| Pages: | 19 |
| | Recorded: | 10/27/2003 | | |
Conveyance: | LICENSE AND ROYALTY AGREEMENT |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/24/2007
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Application #:
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10108140
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Filing Dt:
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03/27/2002
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Publication #:
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Pub Dt:
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10/02/2003
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Title:
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METHODS AND APPARATUS FOR DEPOSITION OF THIN FILMS
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Assignee
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2-5-1 KITA-AOYAMA, MINATO-KU |
TOKYO, JAPAN 107-8077 |
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Correspondence name and address
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AKERMAN SENTERFITT
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NEIL R. JETTER
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222 LAKEVIEW AVENUE, SUITE 400
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P.O. BOX 3188
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WEST PALM BEACH, FL 33402-3188
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