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Patent #:
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Issue Dt:
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05/29/1984
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Application #:
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06412980
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Filing Dt:
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08/30/1982
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Title:
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PACKAGE
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Patent #:
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Issue Dt:
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05/19/1987
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Application #:
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06607349
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Filing Dt:
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05/04/1984
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Title:
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DENUDING SILICON SUBSTRATES WITH OXYGEN AND HALOGEN
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Patent #:
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Issue Dt:
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11/11/1986
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Application #:
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06607996
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Filing Dt:
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06/25/1984
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Title:
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CONDITIONED SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
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08/26/1986
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Application #:
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06736203
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Filing Dt:
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06/28/1985
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Title:
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GETTERING
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Patent #:
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Issue Dt:
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07/25/1989
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Application #:
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07154759
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Filing Dt:
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02/11/1988
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Title:
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SEMICONDUCTOR WAFER FABRICATION WITH IMPROVED CONTROL OF INTERNAL GETTERING SITES USING RAPID THERMAL ANNEALING
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Patent #:
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Issue Dt:
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09/19/1989
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Application #:
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07324858
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Filing Dt:
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03/16/1989
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Title:
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SEMICONDUCTOR WAFER FABRICATION WITH IMPROVED CONTROL OF INTERNAL GETTERING SITES USING RTA
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Patent #:
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Issue Dt:
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01/12/1993
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Application #:
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07744891
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Filing Dt:
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08/14/1991
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Title:
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METHOD FOR CONTROLLING OXYGEN CONTENT OF SILICON CRYSTALS USING A COMBINATION OF CUSP MAGNETIC FIELD AND CRYSTAL AND CRUCIBLE ROTATION RATES
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Patent #:
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Issue Dt:
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02/22/1994
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Application #:
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07873375
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Filing Dt:
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04/24/1992
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Title:
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METHOD FOR GROWING MULTIPLE SINGLE CRYSTALS AND APPARATUS FOR USE THEREIN
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Patent #:
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Issue Dt:
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08/29/1995
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Application #:
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07996037
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Filing Dt:
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12/23/1992
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Title:
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CLEANING OF POLYCRYSTALLINE SILICON FOR CHARGING INTO A CZOCHRALSKI GROWING PROCESS
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Patent #:
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Issue Dt:
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01/03/1995
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Application #:
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08021215
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Filing Dt:
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02/23/1993
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Title:
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WAFER POLISHING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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12/27/1994
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Application #:
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08074915
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Filing Dt:
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06/10/1993
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Title:
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CAPACITIVE DISTANCE MEASURING APPARATUS HAVING LIQUID GROUND CONTACT
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Patent #:
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Issue Dt:
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04/25/1995
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Application #:
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08095759
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Filing Dt:
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07/21/1993
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Title:
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METHOD FOR GROWING SILICON CRYSTAL
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Patent #:
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Issue Dt:
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08/23/1994
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Application #:
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08133980
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Filing Dt:
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10/08/1993
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Title:
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PROCESS AND APPARATUS FOR ETCHING SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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12/20/1994
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Application #:
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08148896
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Filing Dt:
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11/08/1993
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Title:
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METHOD FOR GROWING MULTIPLE SINGLE CRYSTALS AND APPARATUS FOR USE THEREIN
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Patent #:
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Issue Dt:
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02/06/1996
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Application #:
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08163661
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Filing Dt:
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12/06/1993
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Title:
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HOPPER FOR USE IN CHARGING SEMICONDUCTOR SOUCE MATERIAL
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Patent #:
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Issue Dt:
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05/23/1995
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Application #:
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08174046
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Filing Dt:
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12/28/1993
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Title:
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WAFER CARRIER
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Patent #:
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Issue Dt:
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08/08/1995
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Application #:
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08195766
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Filing Dt:
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02/14/1994
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Title:
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DEVICE FOR SUPPRESSING PARTICLE SPLASH ONTO A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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06/06/1995
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Application #:
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08214969
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Filing Dt:
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03/18/1994
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Title:
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SEMICONDUCTOR WAFER POLISHER AND METHOD
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Patent #:
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Issue Dt:
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08/27/1996
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Application #:
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08241972
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Filing Dt:
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05/12/1994
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Title:
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METHODS AND APPARATUS FOR DETERMINING INTERSTITIAL OXYGEN CONTENT OF RELATIVELY LARGE DIAMETER SILICON CRYSTALS BY INFRARED SPECTROSCOPY
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Patent #:
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Issue Dt:
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02/25/1997
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Application #:
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08242560
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Filing Dt:
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05/13/1994
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Title:
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SEMICONDUCTOR WAFER POLISHING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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11/05/1996
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Application #:
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08245592
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Filing Dt:
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05/18/1994
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Title:
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METHOD OF ROUGH POLISHING SEMICONDUCTOR WAFERS TO REDUCE SURFACE ROUGHNESS
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Patent #:
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Issue Dt:
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04/22/1997
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Application #:
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08259052
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Filing Dt:
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06/13/1994
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Title:
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GETTERING OF METALS FROM SOLUTION
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Patent #:
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Issue Dt:
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11/12/1996
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Application #:
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08283782
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Filing Dt:
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08/01/1994
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Title:
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METHOD FOR ETCHING A SEMICONDUCTOR MATERIAL WITHOUT ALTERING FLOW PATTERN DEFECT DISTRIBUTION
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Patent #:
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Issue Dt:
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05/14/1996
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Application #:
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08296537
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Filing Dt:
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08/26/1994
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Title:
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PRE-THERMAL TREATMENT CLEANING PROCESS OF WAFERS
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Patent #:
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Issue Dt:
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05/27/1997
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Application #:
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08330906
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Filing Dt:
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10/28/1994
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Title:
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METHOD AND APPARATUS FOR AUTOMATED QUALITY CONTROL IN WAFER SLICING
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Patent #:
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Issue Dt:
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01/14/1997
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Application #:
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08403301
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Filing Dt:
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03/14/1995
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Title:
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PRECISION CONTROLLED PRECIPITATION OF OXYGEN IN SILICON
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Patent #:
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Issue Dt:
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05/21/1996
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Application #:
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08423363
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Filing Dt:
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04/18/1995
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Title:
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SUSCEPTOR AND BAFFLE THEREFOR
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Patent #:
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Issue Dt:
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01/14/1997
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Application #:
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08424904
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Filing Dt:
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04/19/1995
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Title:
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METHOD FOR CLEANING SEMICONDUCTOR WAFERS WITH SONIC ENERGY AND PASSING THROUGH A GAS-LIQUID-INTERFACE
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Patent #:
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Issue Dt:
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01/07/1997
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Application #:
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08436840
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Filing Dt:
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05/08/1995
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Title:
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APPARATUS AND METHOD FOR SEMICONDUCTOR WAFER EDGE INSPECTION
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Patent #:
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Issue Dt:
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08/05/1997
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Application #:
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08459765
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Filing Dt:
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06/02/1995
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Title:
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METHOD FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Patent #:
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Issue Dt:
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11/26/1996
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Application #:
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08483304
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Filing Dt:
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06/07/1995
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Title:
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A SILICON SINGLE CRYSTAL HAVING ELIMINATED DISCLOCATION IN ITS NECK CRYSTAL
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Patent #:
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Issue Dt:
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01/14/1997
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Application #:
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08488924
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Filing Dt:
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06/09/1995
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Title:
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APPARATUS FOR ROTATING A CRUCIBLE OF A CRYSTAL PULLING MACHINE
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Patent #:
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Issue Dt:
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12/10/1996
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Application #:
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08492666
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Filing Dt:
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06/20/1995
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Title:
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APPARATUS AND METHOD FOR ADJUSTING THE POSITION OF A PULL WIRE OF A CRYSTAL PULLING MACHINE
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Patent #:
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Issue Dt:
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12/31/1996
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Application #:
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08507055
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Filing Dt:
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07/25/1995
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Title:
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METHOD FOR PREPARING MOLTEN SILICON MELT FROM POLYCRYSTALLINE SILICON CHARGE
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Patent #:
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Issue Dt:
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05/19/1998
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Application #:
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08519993
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Filing Dt:
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08/28/1995
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Title:
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CLEANING OF METALLIC CONTAMINANTS FROM THE SURFACE OF POLYCRYSTALLINE SILICON WITH A HALOGEN PLASMA
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Patent #:
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Issue Dt:
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06/01/1999
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Application #:
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08530612
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Filing Dt:
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09/20/1995
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Title:
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METHOD FOR TUNING BARREL REACTOR PURGE SYSTEM
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Patent #:
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Issue Dt:
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06/09/1998
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Application #:
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08551152
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Filing Dt:
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10/31/1995
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Title:
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SOLID MATERIAL DELIVERY SYSTEM FOR A FURNACE
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Patent #:
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Issue Dt:
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08/12/1997
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Application #:
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08558609
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Filing Dt:
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11/14/1995
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Title:
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NON-DISTORTING VIDEO CAMERA FOR USE WITH A SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Patent #:
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Issue Dt:
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01/27/1998
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Application #:
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08568997
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Filing Dt:
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12/07/1995
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Title:
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PRE-THERMAL TREATMENT CLEANING PROCESS
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Patent #:
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Issue Dt:
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05/05/1998
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Application #:
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08582650
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Filing Dt:
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01/04/1996
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Title:
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METHOD AND APPARATUS FOR PURGING BARREL REACTORS
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Patent #:
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Issue Dt:
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10/14/1997
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Application #:
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08589491
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Filing Dt:
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01/22/1996
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Title:
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RAPID COOLING OF CZ SILICON CRYSTAL GROWTH SYSTEM
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Patent #:
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Issue Dt:
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11/24/1998
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Application #:
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08589612
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Filing Dt:
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01/22/1996
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Title:
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APPARATUS FOR CONTROLLING NUCLEATION OF OXYGEN PRECIPITATES IN SILICON CRYSTALS
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Issue Dt:
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09/29/1998
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Application #:
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08595075
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02/01/1996
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Title:
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METHOD FOR PREPARING MOLTEN SILICON MELT FROM POLYCRYSTALLINE SILICON CHARGE
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Issue Dt:
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03/24/1998
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Application #:
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08598518
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02/08/1996
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Title:
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METHOD AND APPARATUS FOR EFFICIENTLY EVALUATING EXISTS AND NOT EXISTS EQUIVALENT SUBQUERIES
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Patent #:
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Issue Dt:
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02/22/2000
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08604813
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02/23/1996
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Title:
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MOISTURE BARRIER BAG HAVING WINDOW
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Issue Dt:
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09/09/1997
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08620137
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Filing Dt:
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03/21/1996
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Title:
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SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Issue Dt:
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11/24/1998
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08639185
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04/26/1996
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Title:
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APPARATUS AND METHOD FOR SHAPING POLISHING PADS
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Issue Dt:
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09/01/1998
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08641179
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04/30/1996
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Title:
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DEHUMIDIFIER
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12/01/1998
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08644181
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05/10/1996
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Title:
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METHOD AND APPARATUS FOR AIMING A BARREL REACTOR NOZZLE
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10/21/1997
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08653666
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05/31/1996
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Title:
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AUTOMATED WAFER LAPPING SYSTEM
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05/13/1997
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08675550
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Filing Dt:
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07/03/1996
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Title:
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PROCESS FOR ELIMINATING DISLOCATIONS IN THE NECK OF A SILICON SINGLE CRYSTAL
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Issue Dt:
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09/16/1997
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Application #:
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08679759
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Filing Dt:
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07/10/1996
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Title:
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AQUEOUS SAMPLE TESTING APPARATUS
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Patent #:
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Issue Dt:
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05/06/1997
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Application #:
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08686367
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07/25/1996
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Title:
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APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
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Issue Dt:
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12/15/1998
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08686565
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07/26/1996
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Title:
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COOLING SYSTEM AND METHOD FOR EPITAXIAL BARREL REACTOR
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Issue Dt:
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08/04/1998
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Application #:
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08689432
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08/09/1996
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Title:
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METHOD AND APPARATUS FOR CONTROLLING FLATNESS OF POLISHED SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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07/14/1998
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08694157
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08/08/1996
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Title:
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PROCESS FOR CONTROLLING THERMAL HISTORY OF CZOCHRALSKI-GROWN SILICON
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Issue Dt:
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10/27/1998
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08710655
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09/20/1996
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Title:
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CUTTING MACHINE
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Issue Dt:
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08/18/1998
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08711085
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Filing Dt:
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09/09/1996
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Title:
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SIO PROBE FOR REAL-TIME MONITORING AND CONTROL OF OXYGEN DURING CZOCHRALSKI GROWTH OF SINGLE CRYSTAL SILICON
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Issue Dt:
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06/16/1998
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08724908
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10/03/1996
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Title:
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DEVICE FOR TRANSFERRING A SEMICONDUCTOR WAFER
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Issue Dt:
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06/16/1998
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08725861
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10/04/1996
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Title:
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A METHOD FOR ROTATING A CRUCIBLE OF A CRYSTAL PULLING MACHINE
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Issue Dt:
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05/18/1999
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08732527
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Filing Dt:
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10/15/1996
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Title:
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PROCESS FOR CONTROLLING THE OXYGEN CONTENT IN SILICON WAFERS HEAVILY DOPED WITH ANTIMONY OR ARSENIC
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01/05/1999
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08739550
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10/30/1996
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Title:
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GETTERING AGENT
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Issue Dt:
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07/06/1999
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08749906
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Filing Dt:
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11/15/1996
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Title:
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CONTROL OF SIO2 ETCH RATE USING DILUTE CHEMICAL ETCHANTS IN THE PRESENCE OF A MEGASONIC FIELD
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Issue Dt:
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06/23/1998
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08764458
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11/12/1996
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Title:
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POLISHING BLOCK HEATER
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08/04/1998
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08774519
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12/30/1996
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Title:
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METHOD AND SYSTEM FOR MONOCRYSTALLINE EPITAXIAL DEPOSITION
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12/01/1998
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08779976
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12/23/1996
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Title:
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PROCESS FOR ETCHING N, P, N+ AND P+ TYPE SLUGS AND WAFERS
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10/06/1998
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08843632
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04/10/1997
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Title:
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APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
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08/11/1998
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08863960
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05/27/1997
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Title:
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SECONDARY EDGE REFLECTOR FOR HORIZONTAL REACTOR
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02/16/1999
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08883893
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06/27/1997
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Title:
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BOX CLOSING APPARATUS
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Issue Dt:
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04/20/1999
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08891529
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07/11/1997
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Title:
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BOX HANDLING APPARATUS AND METHOD
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12/28/1999
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08895388
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07/16/1997
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Title:
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METHOD AND APPARATUS FOR CUTTING AN INGOT
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Issue Dt:
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12/08/1998
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Application #:
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08896177
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Filing Dt:
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07/17/1997
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Title:
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METHOD AND SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Patent #:
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Issue Dt:
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08/24/1999
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Application #:
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08904943
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Filing Dt:
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08/01/1997
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Title:
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HEAT SHIELD ASSEMBLY AND METHOD OF GROWING VACANCY RICH SINGLE CRYSTAL SILICON
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Patent #:
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Issue Dt:
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03/23/1999
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Application #:
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08907795
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Filing Dt:
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08/08/1997
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Title:
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NON-DASH NECK METHOD FOR SINGLE CRYSTAL SILICON GROWTH
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Patent #:
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Issue Dt:
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11/02/1999
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Application #:
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08917206
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Filing Dt:
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08/22/1997
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Title:
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APPARATUS FOR USE IN CLEANING WAFERS
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Issue Dt:
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03/16/1999
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Application #:
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08934946
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Filing Dt:
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09/22/1997
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Title:
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PROCESS FOR THE PREPARATION OF SILICON WAFERS HAVING A CONTROLLED DISTRIBUTION OF OXYGEN PRECIPITATE NUCLEATION CENTERS
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Patent #:
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Issue Dt:
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03/16/1999
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Application #:
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08939802
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Filing Dt:
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09/30/1997
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Title:
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METHOD AND SYSTEM FOR CONTROLLING GROWTH OF A SILICON CRYSTAL
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Patent #:
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Issue Dt:
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07/13/1999
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Application #:
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08940166
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Filing Dt:
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09/30/1997
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Title:
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HEAT SHIELD FOR CRYSTAL PULLER
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Patent #:
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Issue Dt:
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02/02/1999
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Application #:
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08941777
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Filing Dt:
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09/30/1997
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Title:
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WAFER DEMOUNT APPARATUS
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Patent #:
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|
Issue Dt:
|
11/02/1999
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Application #:
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08943091
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Filing Dt:
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09/26/1997
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Title:
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WAFER PROCESSING APPARATUS
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Patent #:
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Issue Dt:
|
05/25/1999
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Application #:
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08950842
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Filing Dt:
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10/15/1997
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Title:
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RADIANT POLISHING BLOCK HEATER
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Patent #:
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Issue Dt:
|
07/06/1999
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Application #:
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08951264
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Filing Dt:
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10/16/1997
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Title:
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PROCESS FOR PREPARING A SILICON MELT FROM A POLYSILICON CHARGE
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Patent #:
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Issue Dt:
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06/08/1999
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Application #:
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08966798
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Filing Dt:
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11/10/1997
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Title:
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CLOSED LOOP PROCESS FOR PRODUCING POLYCRYSTALLINE SILICON AND FUMED SILICA
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Patent #:
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Issue Dt:
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11/24/1998
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Application #:
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08970129
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Filing Dt:
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11/13/1997
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Title:
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APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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08/10/1999
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Application #:
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08978334
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Filing Dt:
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11/25/1997
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Title:
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APPARATUS FOR USE IN CRYSTAL PULLING
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Patent #:
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Issue Dt:
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11/17/1998
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Application #:
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08990123
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Filing Dt:
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12/12/1997
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Title:
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POST-LAPPING CLEANING PROCESS FOR SILICON WAFERS
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Patent #:
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Issue Dt:
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01/18/2000
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Application #:
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08991962
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Filing Dt:
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12/17/1997
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Title:
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APPARATUS FOR DRESSING INSIDE DIAMETER SAWS
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Patent #:
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Issue Dt:
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12/28/1999
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Application #:
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09000061
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Filing Dt:
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04/21/1998
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Title:
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METHOD AND APPARATUS FOR WASHING SILICON INGOT WITH WATER TO REMOVE PARTICULATE MATTER
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Patent #:
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Issue Dt:
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02/01/2000
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Application #:
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09002592
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Filing Dt:
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01/05/1998
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Title:
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CRYSTAL GROWING APPARATUS WITH MELT-DOPING FACILITY
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Patent #:
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Issue Dt:
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11/23/1999
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Application #:
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09003986
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Filing Dt:
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01/07/1998
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Title:
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SITU WAFER CLEANING PROCESS
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Patent #:
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Issue Dt:
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06/22/1999
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Application #:
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09017942
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Filing Dt:
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02/03/1998
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Title:
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CRUCIBLE AND METHOD OF PREPARATION THEREOF
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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09030110
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Filing Dt:
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02/25/1998
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Title:
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IDEAL OXYGEN PRECIPITATING SILICON WAFERS AND OXYGEN OUT-DIFFUSION- LESS PROCESS THEREFOR
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Patent #:
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Issue Dt:
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02/29/2000
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Application #:
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09030894
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Filing Dt:
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02/26/1998
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Title:
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FLATTENING PROCESS FOR EPITAXIAL SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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09040123
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Filing Dt:
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03/17/1998
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Title:
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APPARATUS FOR MOVING EXHAUST TUBE OF BARREL REACTOR
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Patent #:
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Issue Dt:
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10/19/1999
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Application #:
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09053164
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Filing Dt:
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04/01/1998
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Title:
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OPEN-LOOP METHOD AND SYSTEM FOR CONTROLLING GROWTH OF SEMICONDUCTOR CRYSTAL
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09057800
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Filing Dt:
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04/09/1998
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Title:
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LOW DEFECT DENSITY, IDEAL OXYGEN PRECIPITATING SILICON
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09057801
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Filing Dt:
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04/09/1998
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Title:
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LOW DEFECT DENSITY SELF-INTERSTITIAL DOMINATED SILICON
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Patent #:
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Issue Dt:
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07/06/1999
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Application #:
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09057851
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Filing Dt:
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04/09/1998
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Title:
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LOW DEFECT DENSITY VACANCY DOMINATED SILICON
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09057907
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Filing Dt:
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04/09/1998
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Title:
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LOW DEFECT DENSITY SILICON
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Patent #:
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Issue Dt:
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07/18/2000
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Application #:
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09069417
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Filing Dt:
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04/29/1998
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Title:
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METHOD AND SYSTEM FOR SUPPLYING SEMICONDUCTOR SOURCE MATERIAL
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