Total properties:
45
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Patent #:
|
|
Issue Dt:
|
02/02/1993
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Application #:
|
07699577
|
Filing Dt:
|
05/14/1991
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Title:
|
WORKPIECE SUPPORT
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|
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Patent #:
|
|
Issue Dt:
|
06/18/1996
|
Application #:
|
08291575
|
Filing Dt:
|
08/16/1994
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Title:
|
METHOD FOR FILING SUBSTRATE RECESSES USING ELEVATED TEMPERATURE AND PRESSURE
|
|
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Patent #:
|
|
Issue Dt:
|
02/23/1999
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Application #:
|
08362429
|
Filing Dt:
|
12/28/1994
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Title:
|
METHOD OF TREATING A SEMI-CONDUCTOR WAFER
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|
|
Patent #:
|
|
Issue Dt:
|
05/21/1996
|
Application #:
|
08426018
|
Filing Dt:
|
04/20/1995
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Title:
|
METHOD AND APPARATUS FOR SUBJECTING A WORKPIECE TO ELEVATED PRESSURE
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|
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Patent #:
|
|
Issue Dt:
|
12/01/1998
|
Application #:
|
08530195
|
Filing Dt:
|
10/02/1995
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Title:
|
FORMING A LAYER
|
|
|
Patent #:
|
|
Issue Dt:
|
11/19/1996
|
Application #:
|
08591026
|
Filing Dt:
|
01/25/1996
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Title:
|
PROCESSING SYSTEM
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|
|
Patent #:
|
|
Issue Dt:
|
05/26/1998
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Application #:
|
08637599
|
Filing Dt:
|
04/25/1996
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Title:
|
TEMPERATURE SENSING METHODS AND APPARATUS
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|
|
Patent #:
|
|
Issue Dt:
|
02/04/2003
|
Application #:
|
08727303
|
Filing Dt:
|
10/08/1996
|
Title:
|
METHOD OF PROCESSING A WORKPIECE
|
|
|
Patent #:
|
|
Issue Dt:
|
02/01/2000
|
Application #:
|
09055185
|
Filing Dt:
|
04/06/1998
|
Title:
|
APPARATUS FOR APPLYING PRESSURE TO A COATED SURFACE OF A WORKPIECE
|
|
|
Patent #:
|
|
Issue Dt:
|
09/11/2001
|
Application #:
|
09174578
|
Filing Dt:
|
10/19/1998
|
Title:
|
METHOD OF TREATING A SEMICONDUCTOR WAFER IN A CHAMBER USING HYDROGEN PEROXIDE AND SILICON CONTAINING GAS OR VAPOR
|
|
|
Patent #:
|
|
Issue Dt:
|
06/05/2001
|
Application #:
|
09251157
|
Filing Dt:
|
02/17/1999
|
Title:
|
METHODS AND APPARATUS FOR TREATING A SEMICONDUCTOR SUBSTRATE
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|
|
Patent #:
|
|
Issue Dt:
|
01/30/2001
|
Application #:
|
09414717
|
Filing Dt:
|
10/12/1999
|
Title:
|
APPARATUS AND METHODS FOR SPUTTERING
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|
|
Patent #:
|
|
Issue Dt:
|
09/24/2002
|
Application #:
|
09446432
|
Filing Dt:
|
01/02/2001
|
Title:
|
APPARATUS FOR PROCESSING WORKPIECES
|
|
|
Patent #:
|
|
Issue Dt:
|
07/23/2002
|
Application #:
|
09462465
|
Filing Dt:
|
03/17/2000
|
Title:
|
METHOD OF FILLING A RECESS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/22/2002
|
Application #:
|
09518141
|
Filing Dt:
|
03/03/2000
|
Title:
|
GAS DELIVERY SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
12/14/2004
|
Application #:
|
09548014
|
Filing Dt:
|
04/12/2000
|
Publication #:
|
|
Pub Dt:
|
09/19/2002
| | | | |
Title:
|
METHOD AND DEPOSITING A LAYER
|
|
|
Patent #:
|
|
Issue Dt:
|
03/18/2003
|
Application #:
|
09568987
|
Filing Dt:
|
05/11/2000
|
Title:
|
DEPOSITION APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/16/2005
|
Application #:
|
10242762
|
Filing Dt:
|
09/13/2002
|
Publication #:
|
|
Pub Dt:
|
06/26/2003
| | | | |
Title:
|
METHODS OF FORMING NITRIDE FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/23/2004
|
Application #:
|
10364343
|
Filing Dt:
|
02/12/2003
|
Publication #:
|
|
Pub Dt:
|
08/14/2003
| | | | |
Title:
|
PLASMA PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/01/2005
|
Application #:
|
10367850
|
Filing Dt:
|
02/19/2003
|
Publication #:
|
|
Pub Dt:
|
08/28/2003
| | | | |
Title:
|
BARRIER LAYER AND METHOD OF DEPOSITING A BARRIER LAYER
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10373768
|
Filing Dt:
|
02/27/2003
|
Publication #:
|
|
Pub Dt:
|
09/04/2003
| | | | |
Title:
|
Pedestal
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/2011
|
Application #:
|
10401184
|
Filing Dt:
|
03/28/2003
|
Publication #:
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|
Pub Dt:
|
03/04/2004
| | | | |
Title:
|
METHOD AND APPARATUS FOR TREATING A SEMI-CONDUCTOR SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
08/16/2005
|
Application #:
|
10434190
|
Filing Dt:
|
05/09/2003
|
Publication #:
|
|
Pub Dt:
|
11/13/2003
| | | | |
Title:
|
SHUTTER
|
|
|
Patent #:
|
|
Issue Dt:
|
08/23/2005
|
Application #:
|
10460310
|
Filing Dt:
|
06/13/2003
|
Publication #:
|
|
Pub Dt:
|
12/18/2003
| | | | |
Title:
|
DIELECTRIC FILM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/27/2005
|
Application #:
|
10464468
|
Filing Dt:
|
06/19/2003
|
Publication #:
|
|
Pub Dt:
|
01/08/2004
| | | | |
Title:
|
DEPOSITION METHODS AND APPARATUS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10625671
|
Filing Dt:
|
07/24/2003
|
Publication #:
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|
Pub Dt:
|
07/01/2004
| | | | |
Title:
|
Showerheads
|
|
|
Patent #:
|
|
Issue Dt:
|
09/20/2005
|
Application #:
|
10637654
|
Filing Dt:
|
08/11/2003
|
Publication #:
|
|
Pub Dt:
|
04/01/2004
| | | | |
Title:
|
METHOD OF FORMING AN ACOUSTIC RESONATOR
|
|
|
Patent #:
|
|
Issue Dt:
|
06/14/2005
|
Application #:
|
10654404
|
Filing Dt:
|
09/04/2003
|
Publication #:
|
|
Pub Dt:
|
03/25/2004
| | | | |
Title:
|
METHOD OF DEPOSITING A LAYER
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10796274
|
Filing Dt:
|
03/10/2004
|
Publication #:
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|
Pub Dt:
|
10/28/2004
| | | | |
Title:
|
Methods of forming tungsten or tungsten containing films
|
|
|
Patent #:
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|
Issue Dt:
|
06/05/2007
|
Application #:
|
10817888
|
Filing Dt:
|
04/06/2004
|
Publication #:
|
|
Pub Dt:
|
10/14/2004
| | | | |
Title:
|
METHODS OF DEPOSITING PIEZOELECTRIC FILMS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10836618
|
Filing Dt:
|
05/03/2004
|
Publication #:
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|
Pub Dt:
|
08/18/2005
| | | | |
Title:
|
Method of etching porous dielectric
|
|
|
Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
|
10859550
|
Filing Dt:
|
06/03/2004
|
Publication #:
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|
Pub Dt:
|
12/09/2004
| | | | |
Title:
|
Trench filling methods
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|
|
Patent #:
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|
Issue Dt:
|
04/01/2008
|
Application #:
|
10923027
|
Filing Dt:
|
08/23/2004
|
Publication #:
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|
Pub Dt:
|
02/24/2005
| | | | |
Title:
|
METHOD OF FORMING A SUBSTANTIALLY CLOSED VOID
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|
|
Patent #:
|
|
Issue Dt:
|
11/28/2006
|
Application #:
|
10997864
|
Filing Dt:
|
11/29/2004
|
Publication #:
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|
Pub Dt:
|
05/12/2005
| | | | |
Title:
|
ACOUSTIC RESONATORS
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|
|
Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
|
10997886
|
Filing Dt:
|
11/29/2004
|
Publication #:
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Pub Dt:
|
06/02/2005
| | | | |
Title:
|
Method of processing a workpiece
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Patent #:
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Issue Dt:
|
07/22/2008
|
Application #:
|
11006634
|
Filing Dt:
|
12/08/2004
|
Publication #:
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|
Pub Dt:
|
06/23/2005
| | | | |
Title:
|
MAGNET ASSEMBLIES
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|
|
Patent #:
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|
Issue Dt:
|
05/22/2007
|
Application #:
|
11088193
|
Filing Dt:
|
03/24/2005
|
Publication #:
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Pub Dt:
|
09/29/2005
| | | | |
Title:
|
RF STAND OFFS
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Patent #:
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Issue Dt:
|
10/16/2007
|
Application #:
|
11088261
|
Filing Dt:
|
03/24/2005
|
Publication #:
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|
Pub Dt:
|
09/29/2005
| | | | |
Title:
|
METHOD OF PROCESSING A WORKPIECE
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|
Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
|
11110757
|
Filing Dt:
|
04/21/2005
|
Publication #:
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Pub Dt:
|
10/27/2005
| | | | |
Title:
|
Methods and apparatus for controlling rotating magnetic fields
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|
|
Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
|
11137430
|
Filing Dt:
|
05/26/2005
|
Publication #:
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Pub Dt:
|
12/08/2005
| | | | |
Title:
|
Film deposition
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Patent #:
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Issue Dt:
|
06/08/2010
|
Application #:
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11143953
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Filing Dt:
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06/03/2005
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Publication #:
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Pub Dt:
|
12/15/2005
| | | | |
Title:
|
METHOD OF FORMING AMORPHOUS TIN BY THERMAL CHEMICAL VAPOR DEPOSITION (CVD)
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Patent #:
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Issue Dt:
|
02/05/2008
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Application #:
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11196239
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Filing Dt:
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08/04/2005
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Publication #:
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Pub Dt:
|
12/08/2005
| | | | |
Title:
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ACOUSTIC RESONATORS
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Patent #:
|
NONE
|
Issue Dt:
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Application #:
|
11231830
|
Filing Dt:
|
09/22/2005
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Publication #:
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Pub Dt:
|
03/30/2006
| | | | |
Title:
|
Substrate processing showerheads
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|
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Patent #:
|
NONE
|
Issue Dt:
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|
Application #:
|
11242863
|
Filing Dt:
|
10/05/2005
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Publication #:
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Pub Dt:
|
08/17/2006
| | | | |
Title:
|
Methods and apparatus for processing the backsides of wafers
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|
|
Patent #:
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Issue Dt:
|
11/19/2013
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Application #:
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11247199
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Filing Dt:
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10/12/2005
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Publication #:
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|
Pub Dt:
|
04/20/2006
| | | | |
Title:
|
METHODS AND APPARATUS FOR SPUTTERING
|
|