Patent Assignment Details
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| Reel/Frame: | 020945/0948 | |
| Pages: | 4 |
| | Recorded: | 05/09/2008 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12080947
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Filing Dt:
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04/07/2008
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Publication #:
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Pub Dt:
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10/09/2008
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Title:
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Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-pieces
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Assignee
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| 2101 DONLEY DRIVE, SUITE 101 |
| AUSTIN, TEXAS 78758 |
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Correspondence name and address
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RICHARD D. EGAN
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O'KEEFE, EGAN, PETERMAN & ENDERS LLP
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1101 CAPITAL OF TX HWY. SO., C-200
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AUSTIN, TEXAS 78746
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