Patent Assignment Details
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| Reel/Frame: | 008721/0952 | |
| Pages: | 4 |
| | Recorded: | 02/28/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/26/2001
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Application #:
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08743059
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Filing Dt:
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11/04/1996
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Title:
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RF TUNING METHOD FOR AN RF PLASMA REACTOR USING FREQUENCY SERVOING AND POWER, VOLTAGE, CURRENT OR DI/DT CONTROL
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Assignee
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| P.O. BOX 450A, LEGAL DEPT. |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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PETER S. SGARBOSSA
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LEGAL DEPT.
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P.O. BOX 405A
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SANTA CLARA, CA 95052
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