Patent Assignment Details
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Reel/Frame: | 015960/0954 | |
| Pages: | 6 |
| | Recorded: | 11/01/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/12/2006
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Application #:
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10495648
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Filing Dt:
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10/26/2004
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Publication #:
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Pub Dt:
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04/21/2005
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Title:
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HOLDING DEVICE, IN PARTICULAR FOR FIXING A SEMICONDUCTOR WAFER IN A PLASMA ETCHING DEVICE, AND METHOD FOR SUPPLYING HEAT TO OR DISSIPATING HEAT FROM A SUBSTRATE
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Assignee
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P OSTFACH 30 02 20 |
D-70442 STUTTGART, GERMAN DEMOCRATIC REPUBLIC |
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Correspondence name and address
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KENYON & KENYON
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ONE BROADWAY
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NEW YORK, NY 10004
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