Patent Assignment Details
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| Reel/Frame: | 038580/0954 | |
| Pages: | 2 |
| | Recorded: | 05/13/2016 | | |
| Attorney Dkt #: | 032573.00071 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/10/2017
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Application #:
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15011218
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Filing Dt:
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01/29/2016
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Publication #:
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Pub Dt:
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06/09/2016
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Title:
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METHOD OF TEMPERATURE COMPENSATION IN HIGH POWER FOCUSING SYSTEM FOR EUV LPP SOURCE
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Assignee
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| 17075 THORNMINT COURT |
| SAN DIEGO, CALIFORNIA 92127 |
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Correspondence name and address
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ARENT FOX LLP
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1717 K STREET, NW
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WASHINGTON, DC 20006
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09/24/2024 08:48 PM
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