Total properties:
123
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2
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2
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Patent #:
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Issue Dt:
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11/10/1992
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Application #:
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07776598
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Filing Dt:
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10/11/1991
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Title:
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ION SOURCE
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Patent #:
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Issue Dt:
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04/20/1993
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Application #:
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07779444
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Filing Dt:
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10/18/1991
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Title:
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NARROW SPECTRAL BAND PYROMETRY
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Patent #:
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Issue Dt:
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12/27/1994
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Application #:
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07818662
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Filing Dt:
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01/09/1992
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Title:
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PLASMA ETCH PROCESS AND EQUIPMENT
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Patent #:
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Issue Dt:
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04/05/1994
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Application #:
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07877452
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Filing Dt:
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05/01/1992
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Title:
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ION ACCELERATOR
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Patent #:
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Issue Dt:
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06/07/1994
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Application #:
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07958077
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Filing Dt:
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10/07/1992
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Title:
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METHOD OF MONITORING ION BEAM CURRENT IN ION IMPLANTATION APPARATUS FOR USE IN MANUFACTURING SEMICONDUCTORS
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Patent #:
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Issue Dt:
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09/06/1994
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Application #:
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07964381
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Filing Dt:
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10/21/1992
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Title:
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SPIRAL SCAN COMPUTER TOMOGRAPHY APPARATUS
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Patent #:
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Issue Dt:
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04/26/1994
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Application #:
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08033286
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Filing Dt:
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03/16/1993
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Title:
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PRODUCTION OF HIGH BEAM CURRENTS AT LOW ENERGIES FOR USE IN ION IMPLANTATION SYSTEMS
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Patent #:
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Issue Dt:
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11/05/1996
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Application #:
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08059033
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Filing Dt:
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05/07/1993
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Title:
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CHARGE MONITOR FOR HIGH POTENTIAL PULSE CURRENT DOSE MEASUREMENT APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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09/27/1994
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Application #:
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08076509
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Filing Dt:
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06/14/1993
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Title:
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WAFER RETAINING PLATEN HAVING PERIPHERAL CLAMP AND WAFER LIFTING MEANS
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Patent #:
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Issue Dt:
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01/23/1996
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Application #:
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08125117
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Filing Dt:
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09/21/1993
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Title:
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SCAN TECHNIQUE TO REDUCE TRANSIENT WAFER TEMPERATURES DURING ION IMPLANTATION
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Patent #:
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Issue Dt:
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06/20/1995
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Application #:
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08213459
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Filing Dt:
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03/14/1994
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Title:
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ANTI-STICK ELECTROSTATIC CHUCK FOR A LOW PRESSURE ENVIRONMENT
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Patent #:
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Issue Dt:
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12/24/1996
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Application #:
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08304719
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Filing Dt:
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09/12/1994
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Title:
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PLASMA ETCH EQUIPMENT
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Patent #:
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Issue Dt:
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03/26/1996
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Application #:
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08343116
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Filing Dt:
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11/22/1994
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Title:
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METHOD OF CONSTRUCTING CMOS VERTICALLY MODULATED WELLS (VMW) BY CLUSTERED MEV BILLI (BURIED IMPLANTED LAYER FOR LATERAL ISOLATION) IMPLANTATION
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Patent #:
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Issue Dt:
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09/19/1995
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Application #:
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08383554
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Filing Dt:
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01/31/1995
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Title:
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ELECTROSTATIC WAFER CLAMP
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Patent #:
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Issue Dt:
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01/27/1998
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Application #:
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08469401
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Filing Dt:
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06/06/1995
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Title:
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APPARATUS FOR OBTAINING DOSE UNIFORMITY IN PLASMA DOPING (PLAD) ION IMPLANTATION PROCESSES
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Patent #:
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Issue Dt:
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04/21/1998
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Application #:
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08474027
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Filing Dt:
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06/07/1995
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Title:
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OPTICAL POSITION CALIBRATION SYSTEM
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Patent #:
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Issue Dt:
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05/13/1997
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Application #:
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08585626
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Filing Dt:
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01/16/1996
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Title:
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CHARGED PARTICLE BEAM SYSTEM HAVING BEAM-DEFINING SLIT FORMED BY ROTATING CYCLINDERS
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Patent #:
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Issue Dt:
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09/29/1998
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Application #:
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08617293
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Filing Dt:
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03/18/1996
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Title:
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SEMICONDUCTOR DEVICE HAVING AT LEAST ONE FIELD OXIDE AREA AND CMOS VERTICALLY MODULATED WELLS (VMW) WITH A BURIED IMPLANTED LAYER FOR LATERAL ISOLATION
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Patent #:
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Issue Dt:
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11/25/1997
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Application #:
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08728421
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Filing Dt:
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10/10/1996
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Title:
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WAFER ORIENTATION ALIGNMENT SYSTEM
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Patent #:
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Issue Dt:
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05/26/1998
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Application #:
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08763250
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Filing Dt:
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12/10/1996
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Title:
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ZERO DEFLECTION MAGNETICALLY-SUPPRESSED FARADAY FOR ION IMPLANTERS
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Patent #:
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Issue Dt:
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10/13/1998
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Application #:
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08779899
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Filing Dt:
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01/07/1997
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Title:
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APPARATUS AND METHOD FOR TEMPERATURE CONTROL OF WORKPIECES IN VACUUM
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Patent #:
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Issue Dt:
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10/13/1998
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Application #:
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08822537
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Filing Dt:
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03/19/1997
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Title:
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METHOD FOR CMOS LATCH-UP IMPROVEMENT BY MEV BILLI (BURIED IMPLANTED LAYER FOR LATERAL ISOLATION) PLUS BURIED LAYER IMPLANTATION
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Patent #:
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Issue Dt:
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11/17/1998
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Application #:
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08822543
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Filing Dt:
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03/19/1997
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Title:
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CHARGE EXCHANGE CELL
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