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Reel/Frame:	048175/0960			Pages:	14
		Recorded:	08/27/2018
Attorney Dkt #:	001312/0021
Conveyance:	SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 55

1

Patent #:	6003666	Issue Dt:	12/21/1999	Application #:	08992204	Filing Dt:	12/17/1997
Title:	METHOD AND APPARATUS FOR STORING AND SHIPPING HAZARDOUS MATERIALS

2

Patent #:	6112132	Issue Dt:	08/29/2000	Application #:	09036580	Filing Dt:	03/06/1998
Title:	AUTOMATED TUBE CUTTING APPARATUS AND METHOD

3

Patent #:	6142164	Issue Dt:	11/07/2000	Application #:	09037390	Filing Dt:	03/09/1998
Title:	METHOD AND APPARATUS FOR REMOVING LEAKING GAS IN AN INTEGRATED GAS PANEL SYSTEM

4

Patent #:	6172320	Issue Dt:	01/09/2001	Application #:	09163736	Filing Dt:	09/30/1998
Title:	WELDING METHOD FOR FORMING CHROMIUM OXIDE PASSIVATED FILM AT WELDED PORTION

5

Patent #:	6530388	Issue Dt:	03/11/2003	Application #:	09504299	Filing Dt:	02/15/2000
Title:	VOLUME EFFICIENT CLEANING SYSTEMS

6

Patent #:	6230895	Issue Dt:	05/15/2001	Application #:	09642051	Filing Dt:	08/16/2000
Title:	Container for transporting refurbished semiconductor processing equipment

7

Patent #:	6518534	Issue Dt:	02/11/2003	Application #:	09755379	Filing Dt:	01/05/2001
Title:	WELDING METHOD AND APPARATUS FOR FORMING CHROMIUM OXIDE PASSIVATED FILM AT WELDED PORTION

8

Patent #:	6648982	Issue Dt:	11/18/2003	Application #:	09879412	Filing Dt:	06/11/2001
Title:	STEAM CLEANING SYSTEM AND METHOD FOR SEMICONDUCTOR PROCESS EQUIPMENT

9

Patent #:	6810887	Issue Dt:	11/02/2004	Application #:	09927263	Filing Dt:	08/10/2001
Publication #:	US20040045574	Pub Dt:	03/11/2004
Title:	METHOD FOR CLEANING SEMICONDUCTOR FABRICATION EQUIPMENT PARTS

10

Patent #:	6607605	Issue Dt:	08/19/2003	Application #:	09945259	Filing Dt:	08/31/2001
Publication #:	US20020066466	Pub Dt:	06/06/2002
Title:	CLEANING OF SEMICONDUCTOR PROCESS EQUIPMENT CHAMBER PARTS USING ORGANIC SOLVENTS

11

Patent #:	6554909	Issue Dt:	04/29/2003	Application #:	10010470	Filing Dt:	11/08/2001
Title:	PROCESS FOR CLEANING COMPONENTS USING CLEANING MEDIA

12

Patent #:	6637444	Issue Dt:	10/28/2003	Application #:	10288404	Filing Dt:	11/04/2002
Title:	VOLUME EFFICIENT CLEANING METHODS AND SYSTEMS

13

Patent #:	6902628	Issue Dt:	06/07/2005	Application #:	10304535	Filing Dt:	11/25/2002
Publication #:	US20040099285	Pub Dt:	05/27/2004
Title:	METHOD OF CLEANING A COATED PROCESS CHAMBER COMPONENT

14

Patent #:	6926016	Issue Dt:	08/09/2005	Application #:	10622393	Filing Dt:	07/18/2003
Title:	SYSTEM FOR REMOVING CONTAMINANTS FROM SEMICONDUCTOR PROCESS EQUIPMENT

15

Patent #:	7045072	Issue Dt:	05/16/2006	Application #:	10627185	Filing Dt:	07/24/2003
Publication #:	US20050016958	Pub Dt:	01/27/2005
Title:	CLEANING PROCESS AND APPARATUS FOR SILICATE MATERIALS

16

Patent #:	7091132	Issue Dt:	08/15/2006	Application #:	10627416	Filing Dt:	07/24/2003
Publication #:	US20050016959	Pub Dt:	01/27/2005
Title:	ULTRASONIC ASSISTED ETCH USING CORROSIVE LIQUIDS

17

Patent #:	7097713	Issue Dt:	08/29/2006	Application #:	10643409	Filing Dt:	08/19/2003
Publication #:	US20050039774	Pub Dt:	02/24/2005
Title:	METHOD FOR REMOVING A COMPOSITE COATING CONTAINING TANTALUM DEPOSITION AND ARC SPRAYED ALUMINUM FROM CERAMIC SUBSTRATES

18

Patent #:	6936114	Issue Dt:	08/30/2005	Application #:	10664351	Filing Dt:	09/16/2003
Title:	STEAM CLEANING SYSTEM AND METHOD FOR SEMICONDUCTOR PROCESS EQUIPMENT

19

Patent #:	7754609	Issue Dt:	07/13/2010	Application #:	10696394	Filing Dt:	10/28/2003
Title:	CLEANING PROCESSES FOR SILICON CARBIDE MATERIALS

20

Patent #:	6902627	Issue Dt:	06/07/2005	Application #:	10742604	Filing Dt:	12/19/2003
Publication #:	US20040163669	Pub Dt:	08/26/2004
Title:	CLEANING CHAMBER SURFACES TO RECOVER METAL-CONTAINING COMPOUNDS

21

Patent #:	7048008	Issue Dt:	05/23/2006	Application #:	10823974	Filing Dt:	04/13/2004
Publication #:	US20050224120	Pub Dt:	10/13/2005
Title:	GAS-PANEL ASSEMBLY

22

Patent #:	7618769	Issue Dt:	11/17/2009	Application #:	10863151	Filing Dt:	06/07/2004
Publication #:	US20050271984	Pub Dt:	12/08/2005
Title:	TEXTURED CHAMBER SURFACE

23

Patent #:	7964085	Issue Dt:	06/21/2011	Application #:	10870716	Filing Dt:	06/17/2004
Title:	ELECTROCHEMICAL REMOVAL OF TANTALUM-CONTAINING MATERIALS

24

Patent #:	7267132	Issue Dt:	09/11/2007	Application #:	11054794	Filing Dt:	02/09/2005
Publication #:	US20050217705	Pub Dt:	10/06/2005
Title:	METHODS FOR REMOVING SILICON AND SILICON-NITRIDE CONTAMINATION LAYERS FROM DEPOSITION TUBES

25

Patent #:	NONE	Issue Dt:		Application #:	11055179	Filing Dt:	02/09/2005
Publication #:	US20050233926	Pub Dt:	10/20/2005
Title:	Etchants for removing titanium contaminant species from titanium substrates

26

Patent #:	7073522	Issue Dt:	07/11/2006	Application #:	11055180	Filing Dt:	02/09/2005
Publication #:	US20050217695	Pub Dt:	10/06/2005
Title:	APPARATUS FOR APPLYING DISPARATE ETCHING SOLUTIONS TO INTERIOR AND EXTERIOR SURFACES

27

Patent #:	7452475	Issue Dt:	11/18/2008	Application #:	11061013	Filing Dt:	02/17/2005
Publication #:	US20050167393	Pub Dt:	08/04/2005
Title:	CLEANING PROCESS AND APPARATUS FOR SILICATE MATERIALS

28

Patent #:	7213618	Issue Dt:	05/08/2007	Application #:	11105730	Filing Dt:	04/13/2005
Publication #:	US20050224121	Pub Dt:	10/13/2005
Title:	GAS-PANEL ASSEMBLY

29

Patent #:	7328712	Issue Dt:	02/12/2008	Application #:	11128684	Filing Dt:	05/12/2005
Title:	CLEANING BENCH FOR REMOVING CONTAMINANTS FROM SEMICONDUCTOR PROCESS EQUIPMENT

30

Patent #:	7108002	Issue Dt:	09/19/2006	Application #:	11144551	Filing Dt:	06/02/2005
Title:	STEAM CLEANING SYSTEM AND METHOD FOR SEMICONDUCTOR PROCESS EQUIPMENT

31

Patent #:	7554052	Issue Dt:	06/30/2009	Application #:	11192600	Filing Dt:	07/29/2005
Publication #:	US20070026159	Pub Dt:	02/01/2007
Title:	METHOD AND APPARATUS FOR THE APPLICATION OF TWIN WIRE ARC SPRAY COATINGS

32

Patent #:	7299825	Issue Dt:	11/27/2007	Application #:	11219101	Filing Dt:	09/01/2005
Publication #:	US20060272720	Pub Dt:	12/07/2006
Title:	GAS-PANEL ASSEMBLY

33

Patent #:	7320339	Issue Dt:	01/22/2008	Application #:	11219105	Filing Dt:	09/01/2005
Publication #:	US20060272721	Pub Dt:	12/07/2006
Title:	GAS-PANEL ASSEMBLY

34

Patent #:	7624742	Issue Dt:	12/01/2009	Application #:	11360238	Filing Dt:	02/22/2006
Title:	METHOD FOR REMOVING ALUMINUM FLUORIDE CONTAMINATION FROM ALUMINUM-CONTAINING SURFACES OF SEMICONDUCTOR PROCESS EQUIPMENT

35

Patent #:	7377991	Issue Dt:	05/27/2008	Application #:	11477191	Filing Dt:	06/27/2006
Publication #:	US20060243390	Pub Dt:	11/02/2006
Title:	ULTRASONIC ASSISTED ETCH USING CORROSIVE LIQUIDS

36

Patent #:	7448397	Issue Dt:	11/11/2008	Application #:	11479883	Filing Dt:	06/30/2006
Title:	APPARATUS FOR APPLYING DISPARATE ETCHING SOLUTIONS TO INTERIOR AND EXTERIOR SURFACES

37

Patent #:	7541094	Issue Dt:	06/02/2009	Application #:	11712802	Filing Dt:	02/28/2007
Title:	FIREPOLISHED QUARTZ PARTS FOR USE IN SEMICONDUCTOR PROCESSING

38

Patent #:	NONE	Issue Dt:		Application #:	11775776	Filing Dt:	07/10/2007
Publication #:	US20080009977	Pub Dt:	01/10/2008
Title:	Apparatus and Method for Monitoring a Chemical-Supply System

39

Patent #:	7789969	Issue Dt:	09/07/2010	Application #:	11931272	Filing Dt:	10/31/2007
Publication #:	US20080099054	Pub Dt:	05/01/2008
Title:	METHODS AND APPARATUS FOR CLEANING CHAMBER COMPONENTS

40

Patent #:	NONE	Issue Dt:		Application #:	11935940	Filing Dt:	11/06/2007
Publication #:	US20090114295	Pub Dt:	05/07/2009
Title:	GAS-PANEL ASSEMBLY

41

Patent #:	8118946	Issue Dt:	02/21/2012	Application #:	11948766	Filing Dt:	11/30/2007
Publication #:	US20090139540	Pub Dt:	06/04/2009
Title:	CLEANING PROCESS RESIDUES FROM SUBSTRATE PROCESSING CHAMBER COMPONENTS

42

Patent #:	7427330	Issue Dt:	09/23/2008	Application #:	12069836	Filing Dt:	02/12/2008
Title:	CLEANING BENCH FOR REMOVING CONTAMINANTS FROM SEMICONDUCTOR PROCESS EQUIPMENT

43

Patent #:	8492674	Issue Dt:	07/23/2013	Application #:	12189141	Filing Dt:	08/09/2008
Publication #:	US20090043416	Pub Dt:	02/12/2009
Title:	METHODS AND APPARATUS FOR EX SITU SEASONING OF ELECTRONIC DEVICE MANUFACTURING PROCESS COMPONENTS

44

Patent #:	8097089	Issue Dt:	01/17/2012	Application #:	12339037	Filing Dt:	12/18/2008
Publication #:	US20090197004	Pub Dt:	08/06/2009
Title:	METHODS FOR CLEANING PROCESS KITS AND CHAMBERS, AND FOR RUTHENIUM RECOVERY

45

Patent #:	NONE	Issue Dt:		Application #:	12464484	Filing Dt:	05/12/2009
Publication #:	US20090218042	Pub Dt:	09/03/2009
Title:	Methods For Producing Quartz Parts With Low Defect And Impurity Densities For Use In Semiconductor Processing

46

Patent #:	8142989	Issue Dt:	03/27/2012	Application #:	12618693	Filing Dt:	11/13/2009
Publication #:	US20100059366	Pub Dt:	03/11/2010
Title:	TEXTURED CHAMBER SURFACE

47

Patent #:	8372211	Issue Dt:	02/12/2013	Application #:	12881503	Filing Dt:	09/14/2010
Publication #:	US20110061685	Pub Dt:	03/17/2011
Title:	METHOD AND APPARATUS FOR SHOWERHEAD CLEANING

48

Patent #:	9068273	Issue Dt:	06/30/2015	Application #:	13157867	Filing Dt:	06/10/2011
Publication #:	US20120000793	Pub Dt:	01/05/2012
Title:	ELECTROCHEMICAL REMOVAL OF TANTALUM-CONTAINING MATERIALS

49

Patent #:	8691023	Issue Dt:	04/08/2014	Application #:	13585294	Filing Dt:	08/14/2012
Publication #:	US20130037062	Pub Dt:	02/14/2013
Title:	METHODS AND APPARATUS FOR CLEANING DEPOSITION CHAMBER PARTS USING SELECTIVE SPRAY ETCH

50

Patent #:	8714166	Issue Dt:	05/06/2014	Application #:	13748709	Filing Dt:	01/24/2013
Publication #:	US20130167885	Pub Dt:	07/04/2013
Title:	METHOD AND APPARATUS FOR SHOWERHEAD CLEANING

51

Patent #:	NONE	Issue Dt:		Application #:	14087829	Filing Dt:	11/22/2013
Publication #:	US20140076354	Pub Dt:	03/20/2014
Title:	REMOVING RESIDUES FROM SUBSTRATE PROCESSING COMPONENTS

52

Patent #:	NONE	Issue Dt:		Application #:	14209289	Filing Dt:	03/13/2014
Publication #:	US20140190937	Pub Dt:	07/10/2014
Title:	System and Method for Cleaning Semiconductor Fabrication Equipment Parts

53

Patent #:	9464820	Issue Dt:	10/11/2016	Application #:	14217322	Filing Dt:	03/17/2014
Publication #:	US20140263280	Pub Dt:	09/18/2014
Title:	SURFACE MOUNTED HEATER WITH UNIVERSAL SEAL FITTING

54

Patent #:	NONE	Issue Dt:		Application #:	14933832	Filing Dt:	11/05/2015
Publication #:	US20160056061	Pub Dt:	02/25/2016
Title:	REAL TIME LIQUID PARTICLE COUNTER (LPC) END POINT DETECTION SYSTEM

55

Patent #:	NONE	Issue Dt:		Application #:	15257492	Filing Dt:	09/06/2016
Publication #:	US20170232784	Pub Dt:	08/17/2017
Title:	System and Method for Cleaning Semiconductor Fabrication Equipment Parts

Assignors

1

ULTRA CLEAN HOLDINGS, INC.

Exec Dt:

08/27/2018

2

UCT THERMAL SOLUTIONS, INC.

Exec Dt:

08/27/2018

3

ULTRA CLEAN TECHNOLOGY SYSTEMS AND SERVICE, INC.

Exec Dt:

08/27/2018

4

QUANTUM GLOBAL TECHNOLOGIES, LLC

Exec Dt:

08/27/2018

Assignee

1

BARCLAYS BANK PLC, AS ADMINISTRATIVE AGENT

745 SEVENTH AVENUE

NEW YORK, NEW YORK 10019

Correspondence name and address
	ALEX MOSER
	2475 HANOVER STREET
	PALO ALTO, CA 94304

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