Patent Assignment Details
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Reel/Frame: | 016257/0962 | |
| Pages: | 3 |
| | Recorded: | 02/08/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/11/2008
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Application #:
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11053018
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Filing Dt:
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02/08/2005
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Publication #:
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Pub Dt:
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08/10/2006
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Title:
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POST ETCH COPPER CLEANING USING DRY PLASMA
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Assignee
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NO. 8, LI-HSIN RAOD 6 |
SCIENCE-BASED INDUSTRIAL PARK |
HSIN-CHU, TAIWAN 300-77, R.O.C. |
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Correspondence name and address
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WILLIAM H. MURRAY
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DUANE MORRIS LLP
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ONE LIBERTY PLACE
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PHILADELPHIA, PA 19103-7396
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