Patent Assignment Details
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| Reel/Frame: | 018299/0963 | |
| Pages: | 7 |
| | Recorded: | 09/22/2006 | | |
| Attorney Dkt #: | 20228-012001 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11414692
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Filing Dt:
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04/28/2006
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Publication #:
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Pub Dt:
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01/11/2007
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Title:
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Optical element, in particular for an objective or an illumination system of a microlithographic projection exposure apparatus
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Assignee
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| CARL-ZEISS-STRASSE 22 |
| 73447 OBERKOCHEN, GERMANY |
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Correspondence name and address
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SEAN P. DALEY
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FISH & RICHARDSON P.C.
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225 FRANKLIN STREET
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BOSTON, MA 02110
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