Patent Assignment Details
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Reel/Frame: | 012524/0966 | |
| Pages: | 2 |
| | Recorded: | 01/18/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10054450
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Filing Dt:
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01/18/2002
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Publication #:
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Pub Dt:
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07/24/2003
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Title:
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Method for scaling down thickness of ONO film with remote plasma nitridation
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Assignee
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SCIENCE-BASED INDUSTRIAL PARK |
NO. 16, LI HSIN ROAD IV |
HSINCHU, TAIWAN |
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Correspondence name and address
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JASON Z. LIN
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19597 VIA MONTE DRIVE
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SARATOGA, CA 95070
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