Total properties:
33
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Patent #:
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Issue Dt:
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03/15/2016
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Application #:
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12767775
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Filing Dt:
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04/26/2010
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Publication #:
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Pub Dt:
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11/04/2010
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Title:
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METHOD AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION
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Patent #:
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Issue Dt:
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03/15/2016
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Application #:
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12870837
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Filing Dt:
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08/29/2010
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Publication #:
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Pub Dt:
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10/27/2011
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Title:
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SYSTEM, METHOD AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION
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Patent #:
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Issue Dt:
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02/16/2016
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Application #:
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13104762
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Filing Dt:
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05/10/2011
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Publication #:
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Pub Dt:
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11/15/2012
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Title:
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Current Threshold Response Mode for Arc Management
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Patent #:
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Issue Dt:
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05/26/2015
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Application #:
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13104942
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Filing Dt:
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05/10/2011
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Publication #:
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Pub Dt:
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10/13/2011
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Title:
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METHODS AND APPARATUS FOR APPLYING PERIODIC VOLTAGE USING DIRECT CURRENT
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Patent #:
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Issue Dt:
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09/06/2016
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Application #:
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13193299
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Filing Dt:
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07/28/2011
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Publication #:
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Pub Dt:
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03/01/2012
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Title:
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Wafer Chucking System for Advanced Plasma Ion Energy Processing Systems
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Patent #:
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Issue Dt:
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04/12/2016
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Application #:
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13193345
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Filing Dt:
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07/28/2011
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Publication #:
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Pub Dt:
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08/30/2012
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Title:
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SYSTEM, METHOD AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION OF A PROJECTED PLASMA
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Patent #:
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Issue Dt:
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07/21/2015
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Application #:
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13343576
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Filing Dt:
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01/04/2012
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Publication #:
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Pub Dt:
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01/03/2013
| | | | |
Title:
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SYSTEM LEVEL POWER DELIVERY TO A PLASMA PROCESSING LOAD
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Patent #:
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Issue Dt:
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10/06/2015
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Application #:
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13417937
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Filing Dt:
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03/12/2012
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Publication #:
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Pub Dt:
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07/05/2012
| | | | |
Title:
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METHODS AND APPARATUS FOR SPUTTERING USING DIRECT CURRENT
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Patent #:
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Issue Dt:
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01/05/2016
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Application #:
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13424262
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Filing Dt:
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03/19/2012
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Publication #:
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Pub Dt:
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09/19/2013
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Title:
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DUAL BEAM NON-CONTACT DISPLACEMENT SENSOR
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Patent #:
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Issue Dt:
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12/08/2015
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Application #:
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13597032
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Filing Dt:
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08/28/2012
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Publication #:
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Pub Dt:
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03/06/2014
| | | | |
Title:
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SYSTEMS AND METHODS FOR CALIBRATING A SWITCHED MODE ION ENERGY DISTRIBUTION SYSTEM
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Patent #:
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Issue Dt:
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06/07/2016
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Application #:
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13597050
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Filing Dt:
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08/28/2012
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Publication #:
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Pub Dt:
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12/20/2012
| | | | |
Title:
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METHOD OF CONTROLLING THE SWITCHED MODE ION ENERGY DISTRIBUTION SYSTEM
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Patent #:
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Issue Dt:
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12/29/2015
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Application #:
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13666668
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Filing Dt:
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11/01/2012
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Publication #:
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Pub Dt:
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05/01/2014
| | | | |
Title:
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ADJUSTABLE NON-DISSIPATIVE VOLTAGE BOOSTING SNUBBER NETWORK
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Patent #:
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Issue Dt:
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03/15/2016
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Application #:
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13681010
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Filing Dt:
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11/19/2012
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Publication #:
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Pub Dt:
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05/22/2014
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Title:
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PASSIVE UNIPOLAR REFERENCING FOR NON-ISOLATED INVERTERS
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Patent #:
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Issue Dt:
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05/26/2015
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Application #:
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13758092
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Filing Dt:
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02/04/2013
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Publication #:
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Pub Dt:
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02/13/2014
| | | | |
Title:
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POWER CONVERTER WITH PREEMPTIVE PROTECTION
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Patent #:
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Issue Dt:
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09/01/2015
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Application #:
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13786813
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Filing Dt:
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03/06/2013
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Publication #:
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Pub Dt:
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08/01/2013
| | | | |
Title:
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Impedance-Matching Network Using BJT Switches in Variable-Reactance Circuits
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Patent #:
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Issue Dt:
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06/23/2015
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Application #:
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13830563
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Filing Dt:
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03/14/2013
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Publication #:
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Pub Dt:
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08/15/2013
| | | | |
Title:
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HIGH FREQUENCY SOLID STATE SWITCHING FOR IMPEDANCE MATCHING
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Patent #:
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Issue Dt:
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09/08/2015
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Application #:
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13867907
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Filing Dt:
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04/22/2013
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Publication #:
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Pub Dt:
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05/01/2014
| | | | |
Title:
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DIFFERING BOOST VOLTAGES APPLIED TO TWO OR MORE ANODELESS ELECTRODES FOR PLASMA PROCESSING
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Patent #:
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|
Issue Dt:
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11/08/2016
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Application #:
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14010599
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Filing Dt:
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08/27/2013
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Publication #:
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Pub Dt:
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06/19/2014
| | | | |
Title:
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Three Terminal PIN Diode
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Patent #:
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Issue Dt:
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08/11/2015
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Application #:
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14011305
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Filing Dt:
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08/27/2013
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Publication #:
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Pub Dt:
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03/06/2014
| | | | |
Title:
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WIDE DYNAMIC RANGE ION ENERGY BIAS CONTROL; FAST ION ENERGY SWITCHING; ION ENERGY CONTROL AND A PULSED BIAS SUPPLY; AND A VIRTUAL FRONT PANEL
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Patent #:
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|
Issue Dt:
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04/12/2016
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Application #:
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14012847
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Filing Dt:
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08/28/2013
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Publication #:
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Pub Dt:
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03/13/2014
| | | | |
Title:
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ARC MANAGEMENT WITH VOLTAGE REVERSAL AND IMPROVED RECOVERY
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Patent #:
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Issue Dt:
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03/22/2016
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Application #:
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14094520
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Filing Dt:
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12/02/2013
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Publication #:
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Pub Dt:
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06/05/2014
| | | | |
Title:
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FREQUENCY TUNING SYSTEM AND METHOD FOR FINDING A GLOBAL OPTIMUM
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Patent #:
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|
Issue Dt:
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03/15/2016
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Application #:
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14184968
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Filing Dt:
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02/20/2014
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Publication #:
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Pub Dt:
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08/21/2014
| | | | |
Title:
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CHARGE REMOVAL FROM ELECTRODES IN UNIPOLAR SPUTTERING SYSTEM
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Patent #:
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Issue Dt:
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12/29/2015
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Application #:
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14185213
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Filing Dt:
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02/20/2014
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Publication #:
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Pub Dt:
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08/21/2014
| | | | |
Title:
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ADJUSTABLE NON-DISSIPATIVE VOLTAGE BOOSTING SNUBBER NETWORK FOR ACHIEVING LARGE BOOST VOLTAGES
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Patent #:
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|
Issue Dt:
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01/03/2017
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Application #:
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14188102
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Filing Dt:
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02/24/2014
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Publication #:
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Pub Dt:
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08/28/2014
| | | | |
Title:
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RELIABLE PLASMA IGNITION AND REIGNITION
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Patent #:
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Issue Dt:
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09/22/2015
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Application #:
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14227583
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Filing Dt:
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03/27/2014
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Publication #:
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Pub Dt:
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07/31/2014
| | | | |
Title:
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CAPACITIVELY COUPLED REMOTE PLASMA SOURCE
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Patent #:
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Issue Dt:
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12/29/2015
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Application #:
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14227731
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Filing Dt:
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03/27/2014
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Publication #:
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Pub Dt:
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07/31/2014
| | | | |
Title:
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VARIABLE-CLASS AMPLIFIER, SYSTEM, AND METHOD
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Patent #:
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Issue Dt:
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12/15/2015
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Application #:
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14284894
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Filing Dt:
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05/22/2014
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Publication #:
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Pub Dt:
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09/11/2014
| | | | |
Title:
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POWER SUPPLY DEVICE FOR PLASMA PROCESSING
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Patent #:
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Issue Dt:
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12/08/2015
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Application #:
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14606857
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Filing Dt:
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01/27/2015
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Publication #:
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Pub Dt:
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05/28/2015
| | | | |
Title:
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METHOD FOR CONTROLLING ION ENERGY DISTRIBUTION
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Patent #:
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Issue Dt:
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05/10/2016
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Application #:
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14731624
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Filing Dt:
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06/05/2015
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Publication #:
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Pub Dt:
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10/08/2015
| | | | |
Title:
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IMPEDANCE MATCHING NETWORK WITH HIGH FREQUENCY SWITCHING
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Patent #:
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Issue Dt:
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10/25/2016
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Application #:
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14740955
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Filing Dt:
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06/16/2015
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Publication #:
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Pub Dt:
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10/01/2015
| | | | |
Title:
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SYSTEM LEVEL POWER DELIVERY TO A PLASMA PROCESSING LOAD
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Patent #:
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Issue Dt:
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12/20/2016
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Application #:
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14741109
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Filing Dt:
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06/16/2015
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Publication #:
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Pub Dt:
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10/01/2015
| | | | |
Title:
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ELECTROSTATIC REMOTE PLASMA SOURCE SYSTEM AND METHOD
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Patent #:
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Issue Dt:
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11/01/2016
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Application #:
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14945324
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Filing Dt:
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11/18/2015
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Publication #:
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Pub Dt:
|
05/19/2016
| | | | |
Title:
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ADJUSTABLE NON-DISSIPATIVE VOLTAGE BOOSTING SNUBBER NETWORK
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Patent #:
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Issue Dt:
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12/13/2016
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Application #:
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14945331
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Filing Dt:
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11/18/2015
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Publication #:
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Pub Dt:
|
03/10/2016
| | | | |
Title:
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ADJUSTABLE NON-DISSIPATIVE VOLTAGE BOOSTING SNUBBER NETWORK FOR ACHIEVING LARGE BOOST VOLTAGES
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