Total properties:
16
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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09926624
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Filing Dt:
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11/27/2001
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Publication #:
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Pub Dt:
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10/03/2002
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Title:
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METHOD FOR FORMING METALLIC FILM AND APPARATUS FOR FORMING THE SAME
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Patent #:
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Issue Dt:
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05/23/2006
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Application #:
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10183512
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Filing Dt:
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06/28/2002
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Publication #:
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Pub Dt:
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02/13/2003
| | | | |
Title:
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METAL FILM VAPOR PHASE DEPOSITION METHOD AND VAPOR PHASE DEPOSITION APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10277733
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Filing Dt:
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10/23/2002
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Publication #:
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Pub Dt:
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05/15/2003
| | | | |
Title:
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Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus
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Patent #:
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Issue Dt:
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04/24/2007
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Application #:
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10384932
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Filing Dt:
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03/07/2003
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Publication #:
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Pub Dt:
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02/12/2004
| | | | |
Title:
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METHOD AND APPARATUS FOR PRODUCTION OF METAL FILM OR THE LIKE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11132222
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Filing Dt:
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05/19/2005
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Publication #:
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Pub Dt:
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10/06/2005
| | | | |
Title:
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Method and apparatus for production of metal film or the like
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Patent #:
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Issue Dt:
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08/28/2007
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Application #:
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11132223
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Filing Dt:
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05/19/2005
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Publication #:
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Pub Dt:
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10/20/2005
| | | | |
Title:
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INTERCONNECTION STRUCTURE
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Patent #:
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Issue Dt:
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09/15/2009
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Application #:
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11319458
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Filing Dt:
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12/29/2005
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Publication #:
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Pub Dt:
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05/25/2006
| | | | |
Title:
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METAL FILM PRODUCTION APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11336898
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Filing Dt:
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01/23/2006
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Publication #:
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Pub Dt:
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06/08/2006
| | | | |
Title:
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Metal film vapor phase deposition method and vapor phase deposition apparatus
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Patent #:
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NONE
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Issue Dt:
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|
Application #:
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11391241
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Filing Dt:
|
03/29/2006
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Publication #:
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Pub Dt:
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08/31/2006
| | | | |
Title:
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Apparatus for the formation of a metal film
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11635600
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Filing Dt:
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12/08/2006
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Publication #:
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Pub Dt:
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07/19/2007
| | | | |
Title:
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Thin film preparation apparatus
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11638510
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Filing Dt:
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12/14/2006
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Publication #:
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Pub Dt:
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06/21/2007
| | | | |
Title:
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Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus
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Patent #:
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NONE
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Issue Dt:
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|
Application #:
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11638511
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Filing Dt:
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12/14/2006
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Publication #:
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Pub Dt:
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04/19/2007
| | | | |
Title:
|
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus
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|
|
Patent #:
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NONE
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Issue Dt:
|
|
Application #:
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11638522
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Filing Dt:
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12/14/2006
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Publication #:
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Pub Dt:
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05/24/2007
| | | | |
Title:
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Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus
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Patent #:
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|
Issue Dt:
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02/09/2010
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Application #:
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11798883
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Filing Dt:
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05/17/2007
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Publication #:
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Pub Dt:
|
11/29/2007
| | | | |
Title:
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BARRIER METAL FILM PRODUCTION METHOD
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
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11919341
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Filing Dt:
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10/26/2007
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Publication #:
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Pub Dt:
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03/11/2010
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Title:
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Etching method, method for producing dielectric film of low dielectric constant, method for producing porous member, etching system and thin film forming equipment
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12247432
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Filing Dt:
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10/08/2008
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Publication #:
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Pub Dt:
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04/16/2009
| | | | |
Title:
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APPARATUS FOR THE FORMATION OF A METAL FILM
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|