Total properties:
11
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Patent #:
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Issue Dt:
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07/23/2002
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Application #:
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09451512
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Filing Dt:
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11/30/1999
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Title:
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METHOD AND APPARATUS FOR MATCHING A VARIABLE LOAD IMPEDANCE WITH AN RF POWER GENERATOR IMPEDANCE
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09490128
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Filing Dt:
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01/24/2000
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Title:
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METHODS AND APPARATUS FOR RF POWER PROCESS OPERATIONS WITH AUTHOMATIC INPUT POWER CONTROL
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Patent #:
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Issue Dt:
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02/24/2004
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Application #:
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09863678
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Filing Dt:
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05/23/2001
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Publication #:
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Pub Dt:
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01/09/2003
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Title:
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WIDE RANGE DC POWER SUPPLY UTILIZING VOLTAGE DOUBLING OUTPUT CAPACITORS AND INDUCTIVE CHOKE TO EXTEND FULL POWER LOAD IMPEDANCE RANGE
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Patent #:
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Issue Dt:
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09/09/2003
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Application #:
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10071621
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Filing Dt:
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02/08/2002
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Publication #:
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Pub Dt:
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08/14/2003
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Title:
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SEMICONDUCTOR PACKAGE FOR MULTIPLE HIGH POWER TRANSISTORS
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Patent #:
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Issue Dt:
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05/20/2003
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Application #:
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10185822
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Filing Dt:
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06/27/2002
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Publication #:
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Pub Dt:
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01/30/2003
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Title:
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ELECTRICAL POWER SUPPLY SUITABLE IN PARTICULAR FOR DC PLASMA PROCESSING
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Patent #:
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Issue Dt:
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12/09/2003
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Application #:
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10211860
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Filing Dt:
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08/01/2002
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Title:
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VOLTAGE AND CURRENT SENSOR
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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10355619
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Filing Dt:
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01/31/2003
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Title:
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MECHANISM FOR MINIMIZING ION BOMBARDMENT ENERGY IN A PLASMA CHAMBER
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Patent #:
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Issue Dt:
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12/06/2005
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Application #:
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10606290
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Filing Dt:
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06/25/2003
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Publication #:
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Pub Dt:
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12/30/2004
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Title:
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DUAL MAGNETRON SPUTTERING APPARATUS UTILIZING CONTROL MEANS FOR DELIVERING BALANCED POWER
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Patent #:
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Issue Dt:
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09/14/2004
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Application #:
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10620129
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Filing Dt:
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07/15/2003
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Title:
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AN IMPROVED RF POWER CONTROL DEVICE FOR RF PLASMA APPLICATIONS
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Patent #:
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Issue Dt:
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05/03/2005
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Application #:
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10621695
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Filing Dt:
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07/16/2003
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Publication #:
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Pub Dt:
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01/20/2005
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Title:
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IMPEDANCE MATCHING NETWORK WITH TERMINATION OF SECONDARY RF FREQUENCIES
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Patent #:
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Issue Dt:
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12/27/2005
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Application #:
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10925832
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Filing Dt:
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08/24/2004
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Title:
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SOFT SWITCHING INTERLEAVED POWER CONVERTER
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