Patent Assignment Details
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| Reel/Frame: | 004140/0977 | |
| Pages: | 1 |
| | Recorded: | 06/09/1983 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/07/1984
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Application #:
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06502461
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Filing Dt:
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06/09/1983
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Title:
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METHOD OF MONITORING STATUS OF A SILICON LAYER BY DETECTING, EMISSION SPECTRA VARIABLE DURING ETCHING
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Assignee
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| 8-1, YOTSUYA 5-CHOME, FUCHU-SHI |
| TOKYO, JAPAN 183 |
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Correspondence name and address
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LAFF, WHITESEL, CONTE & SARET
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JOHN HANCOCK CENTER
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CHICAGO, IL 60611
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