Patent Assignment Details
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Reel/Frame: | 015658/0977 | |
| Pages: | 5 |
| | Recorded: | 08/09/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/12/2007
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Application #:
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10858587
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Filing Dt:
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06/02/2004
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Publication #:
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Pub Dt:
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01/20/2005
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Title:
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APPARATUS AND METHOD FOR MEASURING OVERLAY BY DIFFRACTION GRATINGS
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Assignee
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1250 RELIANCE WAY |
FREMONT, CALIFORNIA 94539 |
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Correspondence name and address
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STALLMAN & POLLOCK LLP
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MICHAEL A. STALLMAN
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353 SACRAMENTO STREET
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SUITE 2200
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SAN FRANCISCO, CA 94111
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