Patent Assignment Details
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| Reel/Frame: | 026339/0979 | |
| Pages: | 5 |
| | Recorded: | 05/25/2011 | | |
| Attorney Dkt #: | ESSEN-00193 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/17/2012
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Application #:
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11244040
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Filing Dt:
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10/06/2005
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Publication #:
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Pub Dt:
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02/01/2007
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Title:
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OPERATING METHOD FOR A LARGE DIMENSION PLASMA ENHANCED ATOMIC LAYER DEPOSITION CAVITY AND AN APPARATUS THEREOF
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Assignee
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| FIRST FLOOR, NO. 81 YO-YI ROAD |
| CHU-NAN CHEN, MIAO-LI HSIAN, TAIWAN |
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Correspondence name and address
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CHENG-JU CHIANG
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P.O. BOX 766
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CHINO, CA 91708
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