Patent Assignment Details
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| Reel/Frame: | 044740/0979 | |
| Pages: | 5 |
| | Recorded: | 01/26/2018 | | |
| Attorney Dkt #: | 536-009.075 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/10/2020
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Application #:
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15718480
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Filing Dt:
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09/28/2017
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Publication #:
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Pub Dt:
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10/04/2018
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Title:
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TECHNOLOGICAL METHOD FOR PREVENTING, BY MEANS OF BURIED ETCH STOP LAYERS, THE CREATION OF VERTICAL/LATERAL INHOMOGENEITIES WHEN ETCHING THROUGH-SILICON VIAS
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Assignee
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| IM TECHNOLOGIEPARK 25 |
| FRANKFURT (ODER), GERMANY 15236 |
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Correspondence name and address
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WARE, FRESSOLA, MAGUIRE & BARBER LLP
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BRADFORD GREEN, BUILDING 5
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755 MAIN STREET
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MONROE, CT 06468
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