Patent Assignment Details
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| Reel/Frame: | 037553/0982 | |
| Pages: | 4 |
| | Recorded: | 01/21/2016 | | |
| Attorney Dkt #: | CYMRP037 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/06/2018
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Application #:
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15003385
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Filing Dt:
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01/21/2016
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Publication #:
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Pub Dt:
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07/27/2017
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Title:
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SYSTEM, METHOD AND APPARATUS FOR TARGET MATERIAL DEBRIS CLEANING OF EUV VESSEL AND EUV COLLECTOR
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Assignee
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| DE RUN 6501, 5504 DR |
| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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Correspondence name and address
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GEORGE B. LEAVELL, ESQ.
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710 LAKEWAY DRIVE, SUITE 200
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SUNNYVALE, CA 94085
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