Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 020802/0984 | |
| Pages: | 3 |
| | Recorded: | 04/15/2008 | | |
| Attorney Dkt #: | 2550/B50 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/13/2010
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Application #:
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12098052
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Filing Dt:
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04/04/2008
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Publication #:
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Pub Dt:
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02/12/2009
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Title:
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POLYSILICON DEPOSITION AND ANNEAL PROCESS ENABLING THICK POLYSILICON FILMS FOR MEMS APPLICATIONS
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Assignee
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| ONE TECHNOLOGY WAY |
| NORWOOD, MASSACHUSETTS 02062-9106 |
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Correspondence name and address
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KATHRYN E. NOLL
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BROMBERG & SUNSTEIN LLP, 125 SUMMER ST.
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BOSTON, MA 02110-1618
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