Patent Assignment Details
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| Reel/Frame: | 011781/0987 | |
| Pages: | 10 |
| | Recorded: | 05/02/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/08/2005
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Application #:
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09847479
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Filing Dt:
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05/02/2001
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Publication #:
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Pub Dt:
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11/07/2002
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Title:
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GATE LINEWIDTH TAILORING AND CRITICAL DIMENSION CONTROL FOR SUB-100 NM DEVICES USING PLASMA ETCHING
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Assignee
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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Correspondence name and address
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IBM CORPORATION
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IRA D. BLECKER, ESQ.
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HUDSON VALLEY RESEARCH PARK, 2070
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ROUTE 52
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HOPEWELL JUNCTION, NY 12533-6531
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