Patent Assignment Details
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| Reel/Frame: | 008527/0989 | |
| Pages: | 2 |
| | Recorded: | 05/27/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/05/1999
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Application #:
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08711781
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Filing Dt:
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09/10/1996
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Title:
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CHAMBER EFFLUENT MONITORING SYSTEM AND SEMICONDUCTOR PROCESSING SYSTEM COMPRISING ABSORPTION SPECTROSCOPY MEASUREMENT SYSTEM, AND METHODS OF USE
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Assignee
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| 75 QUAI D'ORSAY |
| 75321 PARIS CEDEX 07, FRANCE |
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Correspondence name and address
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BURNS, DOANE, SWECKER & MATHIS, LLP
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E. JOSEPH GESS
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P.O. BOX 1401
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ALEXANDRIA, VA 22313-1404
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