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Patent Assignment Details
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Reel/Frame:016584/0990   Pages: 2
Recorded: 05/18/2005
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
01/06/2009
Application #:
10995545
Filing Dt:
11/24/2004
Publication #:
Pub Dt:
11/10/2005
Title:
LITHOGRAPHIC INTERFEROMETER SYSTEM WITH AN ABSOLUTE MEASUREMENT SUBSYSTEM AND DIFFERENTIAL MEASUREMENT SUBSYSTEM AND METHOD THEREOF
Assignors
1
Exec Dt:
05/11/2005
2
Exec Dt:
05/11/2005
3
Exec Dt:
05/11/2005
Assignee
1
DE RUN 6501
NL-5504 DR VELDHOVEN, NETHERLANDS
Correspondence name and address
PILLSBURY WINTHROP SHAW PITTMAN LLP
P.O. BOX 10500
1600 TYSONS BOULEVARD
MCLEAN, VIRGINIA 22102

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