Total properties:
43
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Patent #:
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Issue Dt:
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02/03/2004
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Application #:
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09906384
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Filing Dt:
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07/16/2001
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Publication #:
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Pub Dt:
|
01/23/2003
| | | | |
Title:
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MEGASONIC CLEANER PROBE SYSTEM WITH GASIFIED FLUID
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Patent #:
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|
Issue Dt:
|
10/05/2004
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Application #:
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10031923
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Filing Dt:
|
04/17/2002
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Title:
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APPARATUS FOR TREATING SUBSTRATES
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Patent #:
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Issue Dt:
|
10/30/2007
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Application #:
|
10059682
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Filing Dt:
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01/29/2002
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Publication #:
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Pub Dt:
|
07/31/2003
| | | | |
Title:
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MEGASONIC PROBE ENERGY DIRECTOR
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Patent #:
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Issue Dt:
|
01/04/2005
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Application #:
|
10091011
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Filing Dt:
|
03/04/2002
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Publication #:
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Pub Dt:
|
01/30/2003
| | | | |
Title:
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CLEANING AND DRYING METHOD AND APPARATUS
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Patent #:
|
|
Issue Dt:
|
04/20/2004
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Application #:
|
10098847
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Filing Dt:
|
03/15/2002
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Publication #:
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Pub Dt:
|
09/19/2002
| | | | |
Title:
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DRYING VAPOR GENERATION
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Patent #:
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Issue Dt:
|
07/27/2004
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Application #:
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10117725
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Filing Dt:
|
04/05/2002
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Publication #:
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Pub Dt:
|
10/10/2002
| | | | |
Title:
|
CHEMICAL CONCENTRATION CONTROL DEVICE
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|
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Patent #:
|
|
Issue Dt:
|
03/06/2007
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Application #:
|
10140029
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Filing Dt:
|
05/06/2002
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Publication #:
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Pub Dt:
|
11/06/2003
| | | | |
Title:
|
RECIPROCATING MEGASONIC PROBE
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|
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Patent #:
|
|
Issue Dt:
|
06/29/2004
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Application #:
|
10171426
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Filing Dt:
|
06/12/2002
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Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
MEGASONIC CLEANER AND DRYER
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|
|
Patent #:
|
|
Issue Dt:
|
08/02/2005
|
Application #:
|
10171429
|
Filing Dt:
|
06/12/2002
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Publication #:
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|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
STACKABLE PROCESS CHAMBERS
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|
|
Patent #:
|
|
Issue Dt:
|
08/16/2005
|
Application #:
|
10171430
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Filing Dt:
|
06/12/2002
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Publication #:
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|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
MEGASONIC CLEANER AND DRYER SYSTEM
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|
|
Patent #:
|
|
Issue Dt:
|
06/21/2005
|
Application #:
|
10358636
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Filing Dt:
|
02/05/2003
|
Publication #:
|
|
Pub Dt:
|
08/07/2003
| | | | |
Title:
|
CAPILLARY DRYING OF SUBSTRATES
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|
|
Patent #:
|
|
Issue Dt:
|
07/12/2011
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Application #:
|
10585229
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Filing Dt:
|
04/20/2007
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Publication #:
|
|
Pub Dt:
|
02/14/2008
| | | | |
Title:
|
SYSTEM AND METHOD FOR SELECTIVE ETCHING OF SILICON NITRIDE DURING SUBSTRATE PROCESSING
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|
|
Patent #:
|
|
Issue Dt:
|
10/18/2005
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Application #:
|
10699042
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Filing Dt:
|
10/31/2003
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Publication #:
|
|
Pub Dt:
|
08/05/2004
| | | | |
Title:
|
SUBSTRATE PROCESS TANK WITH ACOUSTICAL SOURCE TRANSMISSION AND METHOD OF PROCESSING SUBSTRATES
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|
|
Patent #:
|
|
Issue Dt:
|
05/23/2006
|
Application #:
|
10742214
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Filing Dt:
|
12/19/2003
|
Publication #:
|
|
Pub Dt:
|
07/22/2004
| | | | |
Title:
|
SONIC-ENERGY CLEANER SYSTEM WITH GASIFIED FLUID
|
|
|
Patent #:
|
|
Issue Dt:
|
09/05/2006
|
Application #:
|
10864927
|
Filing Dt:
|
06/10/2004
|
Publication #:
|
|
Pub Dt:
|
11/11/2004
| | | | |
Title:
|
MEGASONIC CLEANER AND DRYER
|
|
|
Patent #:
|
|
Issue Dt:
|
01/02/2007
|
Application #:
|
10864929
|
Filing Dt:
|
06/10/2004
|
Publication #:
|
|
Pub Dt:
|
07/28/2005
| | | | |
Title:
|
MEGASONIC CLEANING USING SUPERSATURATED CLEANING SOLUTION
|
|
|
Patent #:
|
|
Issue Dt:
|
12/25/2007
|
Application #:
|
10895511
|
Filing Dt:
|
07/20/2004
|
Publication #:
|
|
Pub Dt:
|
01/27/2005
| | | | |
Title:
|
SYSTEM AND METHOD FOR POINT-OF-USE FILTRATION AND PURIFICATION OF FLUIDS USED IN SUBSTRATE PROCESSING
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|
|
Patent #:
|
|
Issue Dt:
|
01/30/2007
|
Application #:
|
10909764
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Filing Dt:
|
08/02/2004
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Publication #:
|
|
Pub Dt:
|
02/03/2005
| | | | |
Title:
|
PROCESS SEQUENCE FOR PHOTORESIST STRIPPING AND/OR CLEANING OF PHOTOMASKS FOR INTEGRATED CIRCUIT MANUFACTURING
|
|
|
Patent #:
|
|
Issue Dt:
|
08/16/2005
|
Application #:
|
10951009
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Filing Dt:
|
09/27/2004
|
Publication #:
|
|
Pub Dt:
|
04/28/2005
| | | | |
Title:
|
MEMBRANE DRYER
|
|
|
Patent #:
|
|
Issue Dt:
|
08/25/2009
|
Application #:
|
11595029
|
Filing Dt:
|
11/09/2006
|
Publication #:
|
|
Pub Dt:
|
03/15/2007
| | | | |
Title:
|
MEGASONIC CLEANING USING SUPERSATURATED SOLUTION
|
|
|
Patent #:
|
|
Issue Dt:
|
01/12/2010
|
Application #:
|
11624445
|
Filing Dt:
|
01/18/2007
|
Title:
|
SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE
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|
|
Patent #:
|
|
Issue Dt:
|
08/31/2010
|
Application #:
|
11625556
|
Filing Dt:
|
01/22/2007
|
Publication #:
|
|
Pub Dt:
|
07/26/2007
| | | | |
Title:
|
ACOUSTIC ENERGY SYSTEM, METHOD AND APPARATUS FOR PROCESSING FLAT ARTICLES
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|
|
Patent #:
|
|
Issue Dt:
|
05/24/2011
|
Application #:
|
11745866
|
Filing Dt:
|
05/08/2007
|
Publication #:
|
|
Pub Dt:
|
11/15/2007
| | | | |
Title:
|
SPRAY JET CLEANING APPARATUS AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
11/10/2009
|
Application #:
|
11873750
|
Filing Dt:
|
10/17/2007
|
Publication #:
|
|
Pub Dt:
|
10/30/2008
| | | | |
Title:
|
METHOD OF CLEANING SUBSTRATES UTILIZING MEGASONIC ENERGY
|
|
|
Patent #:
|
|
Issue Dt:
|
06/03/2014
|
Application #:
|
12070620
|
Filing Dt:
|
02/19/2008
|
Publication #:
|
|
Pub Dt:
|
12/15/2011
| | | | |
Title:
|
Method for cleaning substrates utilizing surface passivation and/or oxide layer growth to protect from pitting
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|
|
Patent #:
|
|
Issue Dt:
|
10/02/2012
|
Application #:
|
12266543
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Filing Dt:
|
11/06/2008
|
Publication #:
|
|
Pub Dt:
|
09/17/2009
| | | | |
Title:
|
COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRATE AND METHOD OF CONSTRUCTING THE SAME
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|
|
Patent #:
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|
Issue Dt:
|
06/30/2015
|
Application #:
|
12445783
|
Filing Dt:
|
10/05/2010
|
Publication #:
|
|
Pub Dt:
|
02/24/2011
| | | | |
Title:
|
SYSTEM AND METHOD FOR THE SONIC-ASSISTED CLEANING OF SUBSTRATES UTILIZING A SONIC-TREATED LIQUID
|
|
|
Patent #:
|
|
Issue Dt:
|
11/15/2011
|
Application #:
|
12685935
|
Filing Dt:
|
01/12/2010
|
Publication #:
|
|
Pub Dt:
|
11/25/2010
| | | | |
Title:
|
SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE
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|
|
Patent #:
|
|
Issue Dt:
|
03/24/2015
|
Application #:
|
12716785
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Filing Dt:
|
03/03/2010
|
Publication #:
|
|
Pub Dt:
|
09/09/2010
| | | | |
Title:
|
METHOD FOR SELECTIVE UNDER-ETCHING OF POROUS SILICON
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|
Patent #:
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Issue Dt:
|
11/27/2012
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Application #:
|
12871286
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Filing Dt:
|
08/30/2010
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Publication #:
|
|
Pub Dt:
|
12/30/2010
| | | | |
Title:
|
ACOUSTIC ENERGY SYSTEM, METHOD AND APPARATUS FOR PROCESSING FLAT ARTICLES
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Patent #:
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Issue Dt:
|
12/27/2011
|
Application #:
|
12898374
|
Filing Dt:
|
10/05/2010
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Publication #:
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Pub Dt:
|
05/12/2011
| | | | |
Title:
|
METHOD OF MANUFACTURING A SOLAR CELL USING A PRE-CLEANING STEP THAT CONTRIBUTES TO HOMOGENEOUS TEXTURE MORPHOLOGY
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Patent #:
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Issue Dt:
|
10/02/2012
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Application #:
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13296760
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Filing Dt:
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11/15/2011
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Publication #:
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Pub Dt:
|
03/15/2012
| | | | |
Title:
|
SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE
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Patent #:
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Issue Dt:
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06/03/2014
|
Application #:
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13633843
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Filing Dt:
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10/02/2012
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Publication #:
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Pub Dt:
|
07/04/2013
| | | | |
Title:
|
SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE
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Patent #:
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Issue Dt:
|
04/05/2016
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Application #:
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13686697
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Filing Dt:
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11/27/2012
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Publication #:
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Pub Dt:
|
12/19/2013
| | | | |
Title:
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METHOD FOR PROCESSING FLAT ARTICLES
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Patent #:
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Issue Dt:
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06/02/2015
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Application #:
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14281829
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Filing Dt:
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05/19/2014
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Publication #:
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Pub Dt:
|
09/11/2014
| | | | |
Title:
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COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRATE AND METHOD OF CONSTRUCTING THE SAME
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Patent #:
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Issue Dt:
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05/10/2016
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Application #:
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14294742
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Filing Dt:
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06/03/2014
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Publication #:
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Pub Dt:
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09/25/2014
| | | | |
Title:
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SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE
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Patent #:
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Issue Dt:
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09/18/2018
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Application #:
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14490080
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Filing Dt:
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09/18/2014
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Publication #:
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Pub Dt:
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03/19/2015
| | | | |
Title:
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SYSTEM, APPARATUS, AND METHOD FOR PROCESSING SUBSTRATES USING ACOUSTIC ENERGY
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Patent #:
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Issue Dt:
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01/01/2019
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Application #:
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14703459
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Filing Dt:
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05/04/2015
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Publication #:
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Pub Dt:
|
11/05/2015
| | | | |
Title:
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CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES
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Patent #:
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Issue Dt:
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06/05/2018
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Application #:
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14727116
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Filing Dt:
|
06/01/2015
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Publication #:
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Pub Dt:
|
09/17/2015
| | | | |
Title:
|
COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRATE AND METHOD OF CONSTRUCTING THE SAME
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Patent #:
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Issue Dt:
|
01/15/2019
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Application #:
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15240451
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Filing Dt:
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08/18/2016
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Publication #:
|
|
Pub Dt:
|
12/08/2016
| | | | |
Title:
|
METHOD FOR SELECTIVE UNDER-ETCHING OF POROUS SILICON
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|
Patent #:
|
|
Issue Dt:
|
03/31/2020
|
Application #:
|
16107525
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Filing Dt:
|
08/21/2018
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Publication #:
|
|
Pub Dt:
|
01/03/2019
| | | | |
Title:
|
SYSTEM, APPARATUS, AND METHOD FOR PROCESSING SUBSTRATES USING ACOUSTIC ENERGY
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|
|
Patent #:
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Issue Dt:
|
04/27/2021
|
Application #:
|
16237302
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Filing Dt:
|
12/31/2018
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Publication #:
|
|
Pub Dt:
|
05/16/2019
| | | | |
Title:
|
CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES
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|
|
Patent #:
|
NONE
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Issue Dt:
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|
Application #:
|
17209299
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Filing Dt:
|
03/23/2021
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Publication #:
|
|
Pub Dt:
|
07/08/2021
| | | | |
Title:
|
CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES
|
|