Patent Assignment Details
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Reel/Frame: | 039964/0992 | |
| Pages: | 4 |
| | Recorded: | 10/07/2016 | | |
Attorney Dkt #: | CT-126US2-0RD |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15281692
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Filing Dt:
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09/30/2016
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Publication #:
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Pub Dt:
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10/05/2017
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Title:
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Method of evaluating aligned patterns in directed self-assembly and using in feedback control scheme
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Assignee
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3-1 AKASAKA 5-CHOME |
AKASAKA BIZ TOWER |
MINATO-KU, TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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2400 GROVE BLVD.
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AUSTIN, TX 78741
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