Patent Assignment Details
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Reel/Frame: | 016090/0994 | |
| Pages: | 3 |
| | Recorded: | 12/21/2004 | | |
Attorney Dkt #: | 55071-145 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/04/2005
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Application #:
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10222972
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Filing Dt:
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08/19/2002
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Publication #:
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Pub Dt:
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04/17/2003
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Title:
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METHOD FOR IMPROVED LITHOGRAPHIC PATTERNING UTILIZING MULTIPLE COHERENCY OPTIMIZED EXPOSURES AND HIGH TRANSMISSION ATTENUATED PSM
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Assignee
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P.O. BOX 324 |
5500 AH VELDHOVEN, NETHERLANDS |
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Correspondence name and address
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MCDERMOTT WILL & EMERY LLP
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600 13TH STREET, N.W.
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WASHINGTON, D.C. 20005-3096
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