Patent Assignment Details
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Reel/Frame: | 005818/0997 | |
| Pages: | 3 |
| | Recorded: | 09/03/1991 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/18/1994
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Application #:
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07723170
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Filing Dt:
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06/28/1991
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Title:
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STRUCTURE AND METHOD FOR DIRECT CALIBRATION OF REGISTRATION MEASUREMENT SYSTEMS TO ACTUAL SEMICONDUCTOR WAFER PROCESS TOPOGRAPHY
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Assignee
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77 REED ROAD |
HUDSON, MASSACHUSETTS 01749 |
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Correspondence name and address
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MICHAEL G. FLETCHER
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ARNOLD, WHITE & DURKEE
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P.O. BOX 4433
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HOUSTON, TX 77210
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