Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/10/2018
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Application #:
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14903799
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Filing Dt:
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01/08/2016
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Publication #:
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Pub Dt:
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06/02/2016
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Inventor:
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Klaus BECKER
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Title:
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METHOD FOR PRODUCING A MIRROR SUBSTRATE BLANK OF TITANIUM-DOPED SILICA GLASS FOR EUV LITHOGRAPHY, AND SYSTEM FOR DETERMINING THE POSITION OF DEFECTS IN A BLANK
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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QUARZSTRASSE 8 |
HANAU, GERMANY 63450 |
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SHERYL NEUMANN |
PANITCH SCHWARZE BELISARIO & NADEL LLP |
2005 MARKET STREET, SUITE 2200 |
PHILADELPHIA, PA 19103-7013 |
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