Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/10/2018
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Application #:
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14966165
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Filing Dt:
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12/11/2015
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Inventors:
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Kevin M. Monahan, Theodore A. Prescop, Michael C. Smayling, David K. Lam
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Title:
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Patterned Atomic Layer Etching And Deposition Using Miniature-Column Charged Particle Beam Arrays
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3951 BURTON DRIVE |
SANTA CLARA, CALIFORNIA 95054 |
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SETH A. HORWITZ |
14801 QUORUM DR. STE. 500 |
DALLAS, TX 75254 |
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