Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/17/2018
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Application #:
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15454872
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Filing Dt:
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03/09/2017
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Inventors:
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Kevin M. Monahan, Michael C. Smayling, Theodore A. Prescop, David K. Lam
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Title:
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ALIGNMENT AND REGISTRATION TARGETS FOR CHARGED PARTICLE BEAM SUBSTRATE PATTERNING AND INSPECTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3951 BURTON DRIVE |
SANTA CLARA, CALIFORNIA 95054 |
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SETH A. HORWITZ |
901 MAIN ST #5500 |
DALLAS, TX 75202 |
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06/20/2024 01:39 PM
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