Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/18/2018
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Application #:
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15630966
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Filing Dt:
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06/23/2017
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Inventors:
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Chien-Hao Chen, Chien-Wei Huang, Chia-Hung Wang, Sho-Shen Lee
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Title:
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SEMICONDUCTOR PATTERN FOR MONITORING OVERLAY AND CRITICAL DIMENSION AT POST-ETCHING STAGE AND METROLOGY METHOD OF THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.3, LI-HSIN ROAD 2, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU CITY, TAIWAN |
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| 6TH FLOOR, PODIUM OF ELECTRIC POWER COMPANY BUILDING, MEILING STREET, JINJIANG CITY |
| QUANZHOU CITY, FUJIAN PROVINCE, CHINA |
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| WINSTON HSU |
| 5F., NO.389, FUHE RD., YONGHE DIST., |
| NEW TAIPEI CITY, TAIWAN |
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Assignment:
2
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| NO.88, LIANHUA AVENUE, INTEGRATED CIRCUIT SCIENCE PARK, JINJIANG CITY |
| QUANZHOU CITY, FUJIAN PROVINCE, CHINA |
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| WINSTON HSU |
| 5F., NO.389, FUHE RD., YONGHE DIST., |
| NEW TAIPEI CITY, TAIWAN |
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