Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/23/2018
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Application #:
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15609199
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Filing Dt:
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05/31/2017
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Publication #:
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Pub Dt:
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12/07/2017
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Inventors:
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Li-Jung LIU, Chih-Pin TSAO, Chia-Wei SOONG, Jyh-Huei CHEN, Shu-Hui WANG, Shih-Hsun CHANG
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Title:
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FLUORINE CONTAMINATION CONTROL IN SEMICONDUCTOR MANUFACTURING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 8, LI-HSIN RD. 6 |
HSINCHU SCIENCE PARK |
HSINCHU, TAIWAN 300-77 |
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STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
1100 NEW YORK AVENUE, N.W. |
WASHINGTON, DC 20005 |
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