Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/30/2018
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Application #:
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14976675
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Filing Dt:
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12/21/2015
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Publication #:
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Pub Dt:
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06/22/2017
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Inventors:
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Tsung-Liang Chen, John Hautala, Shurong Liang, Joseph Olson
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Title:
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TECHNIQUES FOR CONTROLLING ION/NEUTRAL RATIO OF A PLASMA SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| KACVINSKY DAISAK BLUNI PLLC |
| 3120 PRINCETON PIKE |
| SUITE 500 |
| LAWRENCEVILLE, NJ 08648 |
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